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정재인(J. I. Jeong),양지훈(J.H. Yang),박혜선(H.S. Park),정재훈(J.H. Jung),송민아(M.A. Song) 한국표면공학회 2011 한국표면공학회지 Vol.44 No.4
Electron beam evaporation source is widely used to prepare thin films by physical vapor deposition because it is very effective to vaporize materials and there is virtually no limit to vaporize materials including metals and compounds such as oxide. In this study, evaporation characteristics of various metals and compounds from an electron beam evaporation source have been studied. The 180 degree deflection type electron beam evaporation source which has 6-hearth crucibles and is capable of inputting power up to 10 ㎾ was employed for evaporation experiment. 36 materials including metals, oxides and fluorides have been tested and described in terms of optimum crucible liner, evaporation state, stability, and so on. Various crucible liners have been tried to find out the most effective way to vaporize materials. Two types of crucible liners have been employed in this experiment. One is contact type liner, and the other is non-contact type one. It has been tried to give the objective information and the most effective evaporation method on the evaporation of materials from the electron beam evaporation source. It is concluded that the electron beam evaporation source can be used to prepare good quality films by choosing the appropriate crucible liner.
정재인(J. I. Jeong),양지훈(J.H. Yang) 한국표면공학회 2009 한국표면공학회지 Vol.42 No.1
Resistive heating sources are widely used to prepare thin films by vapor deposition because they are cheap, and easy to install and handle in vacuum system. Graphite is one of materials used to make the resistive heating source, but until now only limited applications have been possible as it reacts easily with evaporating materials at high temperature. In this study, evaporation characteristics of aluminum have been investigated by using graphite boat thermally treated with BN powder. The employed graphite boat has been prepared by spray-coating BN power onto the cavity surface of the boat and thermal treatment with aluminum in vacuum at the temperature of more than 1400℃. The voltage-current characteristics as well as resistivity changes of the graphite boat have been investigated during aluminum evaporation according to the applied voltage and time. The evaporation aspect has been picturized during flash evaporation for 40 seconds based on the characterization results. The evaporation rate of the graphite boat has been compared with that of BN boat. The graphite boat showed some different characteristics compared with BN boat, in that the evaporation occurred at the last stage of flash evaporation. The film appearance according to the applied voltage has been compared, and also the reflectance of the resulting film has been investigated according to the film thickness. It has been found that the graphite boat thermally treated with BN powder can be used for aluminum evaporation without problem.
질화붕소가 스프레이코팅된 흑연과 용융 알미늄간의 진공에서의 반응기구
정재인(J. I. Jeong),임병문(B. M. Lim),문종호(J. H. Moon),홍재화(J. H. Hong),강정수(J. S. Kang),이영백(Y. P. Lee) 한국진공학회(ASCT) 1994 Applied Science and Convergence Technology Vol.3 No.1
질화붕소를 스프레이코팅한 흑연과 용융 알미늄간의 진공에서의 반응기구를 여러 가지 분석장치를 이용하여 조사하였다. 계면에 형성된 화합물층은 잘 정의된 형태를 보였으며, Al₄C₃와 Al_8B₄C_7의 혼합상이 흑연 바로 위에 형성되었고 그 위는 주로 AlN층으로 이루어져 있었다. 이러한 화합물의 생성과정과 반응기구를 자유에너지 관점에서 논의하였다. 이러한 방법으로 흑연 보우트를 제조하여 알미늄 증발에 이용하였을 경우, 매우 안정적인 증발 양상을 보였으며, 0.6 ㎛/min 이상의 매우 높은 증발율을 얻을 수 있음을 확인하였다. 또한 제조원가가 저렴하고 (TiB₂BN 보우트의 약 1/100), 전자빔 증발에 의해 형성된 피막과 비교하여 손색이 없는 피막을 얻을 수 있어 새로운 저항가열 증발원으로서의 이용 가능성을 확인하였다. We have investigated the reaction mechanism between BN-sprayed graphite and molten Al in vacuum using the various analytical tools. The interfacial compound layers were well-defined, and made mainly of AlN with underlying thin mixed layer of Al₄C₃ and Al_8B₄C_7. The analysis results were interpreted in terms of the free energy of formation. We prepared the BN-sprayed and annealed graphite boat, and evaluated the performance characteristics for the evaporation of Al. The evaporation was very stable, and also extended lifetime and enhanced rate up to 0.6 ㎛/min were obtained at a manufacturing cost of about 1% compared with current TiB₂ㆍBN boat.
정재인(J.I. Jeong),A. Kurokawa,S. Ichimura,J. Toth,K. Yoshihara,이영백(Y.P. Lee) 한국진공학회(ASCT) 1996 Applied Science and Convergence Technology Vol.5 No.3
새로운 형태의 2차원 평면 표시형 구변경분석기를 제조하여 그 특성을 평가하였다. 이 분석기는 고체 내에서 여기되어 방출된 전자의 에너지와 각도분포를 측정해서 해석하는데 사용하기 위한 것으로 궁극적으로는 비파괴적으로 단층적인 정보를 얻는 표면전자단층해석법 (Surface Electron Spectroscopic Tomography: SEN)를 개발하는 것을 목표로 하고 있다. 이 실험에 사용된 분석기는 H.Daimon 등이 개발한 것과 유사하나 외부에 미소 전자총을 사용한 점이 다르다. 그러나 미소전자총을 사용할 경우, 전자빔이 분석기에 인가된 전압에 의해 간섭을 받기 때문에 많은 문제점을 초래하게 된다. 본 연구에서는 이와 같은 경우에 발생된 제반 문제점과 이를 해결하기 위한 여러 가지 방안 그리고 조정된 분석기를 이용하여 실리콘 시편에서 얻은 Auger 스팩 트럼의 해석을 주로 기술하였다. A new display-type spherical mirror analyzer has been characterized in terms of the performance and the Auger spectra taken by using it. The final goal with the analyzer is to develop SET (Surface Electron Spectroscopic Tomography) which is capable to provide a 3-dimensional layer-by-Iayer information non destructively. This kind of analyzer was originally designed by H.Daimon. The main feature is to display 2-dimensional electronic structures directly onto a screen. In our case, an external micro-electron beam was employed as an excitation source. However, this invokes various problems because of the interference between the electron beam and the analyzer. The problems have been solved through the optimization of various parameters of the analyzer.
증착방법에 따른 Al 피막의 증착율 및 증기분포에 관한 연구
정재인(Jae-In Jeong),정우철(Woo-Chul Jung),손영호(Young-Ho Son),이득진(Deuk-Jin Lee),박성렬(Serng-Yerl Park) 한국진공학회(ASCT) 2000 Applied Science and Convergence Technology Vol.9 No.3
진공증착 및 이온플레이팅 방법을 이용하여 냉간 압연된 강판상에 알루미늄 피막을 형성시킨 후, 증 발율 및 증기분포 변화를 측정하고 각 증착방법에서의 증발율에 따른 증기분포 변화를 비교 및 검토하였다. 본 실험에서의 이온플레이팅은 증발원 근처에 이온화전극을 설치하는 방법으로 고전류 아크 방전을 유도하여 10^(-4) Torr 이하에서도 기존의 이온플레이팅에 비해 높은 이온화율을 얻을 수 있는 아크방전 유도형 이온플레이팅(Arc-induced Ion Plating; AIIP) 방법을 이용하였다. 전자빔을 이용하면서 알루미나 크루시블을 사용하여 알루미늄을 증발시킬 경우 분당 2.0 ㎛이상의 높은 증발율을 얻을 수 있었으며, 이온플레이팅의 경우 이온화된 증기의 상호작용에 따른 산란 효과로 증발율이 다소 낮아짐을 알 수 있었다. cos^nφ로 이루어지는 증기분포의 결정인자(n)의 값이 진공증착의 경우는 1에 근접하는 것으로 나타났고 AIIP의 경우는 2 또는 그보다 더 큰 값으로 이루어지는 것을 확인하였다. 이로부터 이온플레이팅의 경우 이온화율 또는 기판 바이어스 전압의 효과가 다른 조건에 비해 증기분포에 더 크게 영향을 미치는 것을 확인할 수 있었다. Al films on cold-rolled steel sheet have been prepared by vacuum evaporation and arc-induced ion plating, respectively, and the evaporation rate and vapor distribution (thickness distribution over the substrate) have been investigated according to deposition conditions. The arc-induced ion plating (AIIP) method have been employed, which makes use of arc-like discharge current induced by ionization electrode located near the evaporation source. The AIIP takes advantage of high ionization rate compared with conventional ion plating, and can be carried out at low pressure of less than 10^(-4) torr. Very high evaporation rate of more than 2.0 ㎛/min could be achieved for Al evaporation using alumina liner by electron beam evaporation. The geometry factor n for the cos^nφ vapor distribution, which affects the thickness distribution of films at the substrate turned out to be around 1 for vacuum evaporation, while it features around 2 or higher for ion plating. For the ion plated films, it has been found that the ionization condition and substrate bias are the main parameters to affect the thickness distribution of the films.
정재인(Jaein Jeong),박록진(Rokjin Park) 한국기상학회 2013 대기 Vol.23 No.2
We examine the effects of the sea surface temperature (SST) distribution on heavy snowfall over the Yellow Sea using high-resolution SST products and WRF (Weather Research and Forecasting) model simulations in 30 December 2010. First, we evaluate the model by comparing the simulated and observed fresh snowfall over the Korean peninsula (Ho-Nam province). The comparison shows that the model reproduces the distributions and magnitudes of the observed snowfall. We then conduct sensitivity model simulations where SST perturbations by ±1.1℃ relative to baseline SST values (averaged SST for 5~15℃) are uniformly specified over the region of interest. Results show that ±1.1℃ SST perturbation simulations result in changes of air temperature by +0.37/?0.38℃, and by ±0.31 hPa for sea level pressure, respectively, relative to the baseline simulation. Atmospheric responses to SST perturbations are found to be relatively linear. The changes in SST appear to perturb precipitation variability accounting for 10% of snow and graupel, and 18% of snowfall over the Yellow Sea and Ho-Nam province, respectively. We find that anomalies of air temperature, pressure, and hydrometeors due to SST perturbation propagate to the upper part of cloud top up to 500 hPa and show symmetric responses with respect to SST changes.