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다중 슬릿 구조를 이용한 EFG 법으로 성장시킨 β-Ga<sub>2</sub>O<sub>3</sub> 단결정의 다양한 결정면에 따른 특성 분석
장희연,최수민,박미선,정광희,강진기,이태경,김형재,이원재,Hui-Yeon Jang,Su-Min Choi,Mi-Seon Park,Gwang-Hee Jung,Jin-Ki Kang,Tae-Kyung Lee,Hyoung-Jae Kim,Won-Jae Lee 한국결정성장학회 2024 한국결정성장학회지 Vol.34 No.1
β-Ga<sub>2</sub>O<sub>3</sub> is a material with a wide band gap of ~4.8 eV and a high breakdown-voltage of 8 MV/cm, and is attracting much attention in the field of power device applications. In addition, compared to representative WBG semiconductor materials such as SiC, GaN and Diamond, it has the advantage of enabling single crystal growth with high growth rate and low manufacturing cost [1-4]. In this study, we succeeded in growing a 10 mm thick β-Ga<sub>2</sub>O<sub>3</sub> single crystal doped with 0.3 mol% SnO<sub>2</sub> through the EFG (Edge-defined Film-fed Growth) method using multi-slit structure. The growth direction and growth plane were set to [010]/(010), respectively, and the growth speed was about 12 mm/h. The grown β-Ga<sub>2</sub>O<sub>3</sub> single crystal was cut into various crystal planes (010, 001, 100, ${\bar{2}}01$) and surface processed. The processed samples were compared for characteristics according to crystal plane through analysis such as XRD, UV/VIS/NIR/Spec., Mercury Probe, AFM and Etching. This research is expected to contribute to the development of power semiconductor technology in high-voltage and high-temperature applications, and selecting a substrate with better characteristics will play an important role in improving device performance and reliability.
입방정 질화붕소 박막의 잔류응력 형성에 미치는 산소 첨가 효과
장희연(Hee-yeon Jang),박종극(Jong-Keuk Park),이욱성(Wook-Seong Lee),백영준(Young-Joon Baik),임대순(Dae-Soon Lim),정증현(Jeung-hyun Jeong) 한국표면공학회 2007 한국표면공학회지 Vol.40 No.2
In this study, we investigated the oxygen effect on the nucleation and its residual stress during unbalanced magnetron sputtering. Up to 0.5% in oxygen flow rate, cubic phase (c-BN) was dominated with extremely small fraction of hexagonal phase (h-BN) of increasing trend with oxygen concentration, whereas hexagonal phase is dominated beyond 0.75% flow rate. Interestingly, the residual stress in cubic-phase-dominated films was substantially reduced with small amount of oxygen (~0.5%) down to a low value comparable to the h-BN case. This may be because oxygen atoms break B-N sp³ bonds and make B-O bonds more favorably, increasing sp² bonds preference, as revealed by FTIR and NEXAFS. It was confirmed by experimental facts that the threshold bias voltage for nucleation and growth of cubic phase were increased from ?55 V to ?70 V and from ?50 V to ?60 V, respectively. The reduction of residual stress in O-added c-BN films is seemingly resulting from the microstructure of the films. The oxygen tends to increase slightly the amount of h-BN phase in the grain boundary of c-BN and the soft h-BN phase of 3D network including surrounding nano grains of cubic phase may relax the residual stress of cubic phase.
국가환경시료은행 활엽 시료를 활용한 지역별 대기침적 오염물질 모니터링 활용성 검토
이종천 ( Jongchun Lee ),이장호 ( Jangho Lee ),박종혁 ( Jong-hyouk Park ),이유진 ( Eugene Lee ),심규영 ( Kyuyoung Shim ),장희연 ( Heeyon Jang ) 한국환경영향평가학회 2016 환경영향평가 Vol.25 No.6
국가환경시료은행(NESB)에서는 환경오염물질의 생태계 영향을 모니터링하기 위한 시료로서 8종의 생물시료를 정기적으로 채취하여 초저온(<-130 °C) 저장을 해 오고 있다. 이 중 2 종의 활엽수(느티나무 및 신갈나무 잎)가 중금속 및 잔류성유기오염물질(POPs)과 같은 대기오염물질 모니터링을 위한 환경 시료로서 활용되기 위해 채취되고 있다. 한 지역을 대표하기 위해 군락 내 여러 개체에서 시료를 채취하는 과정에서 개체별 차이 및 오염분포 특성에 따른 이질성이 구성 시료의 대표성에 영향을 미치게 되고 따라서 분석을 통한 측정값을 활용한 연구의 신뢰도에 문제를 초래할 수 있다. 따라서 이러한 시료종은 엄격한 표준운영절차(SOP)에 따라 채취됨으로써 대표성을 확보할 수 있고 이를 근거로 오염물질의 지역간, 연도별 비교가 가능하게 된다. 본 연구에서는 표준운영절차(SOP)에 따라 5 지역의 고정구에서 채취된 신갈나무, 느티나무 잎 시료를 대상으로 지역 간 오염물질의 농도차이를 비교하기 위해 주요원소 및 중금속, 그리고 다환방향족탄화수소(Polycyclic aromatic hydrocarbons, PAHs)에 대한 분석을 실시하였다. 그 결과인 측정값을 활용하기에 앞서 이에 대한 신뢰도 수준을 평가하기 위한 방편으로 시료채취단계에서 중복 시료를, 시료분석단계에서 중복분석을 수행하여 분산분석(ANOVA)을 수행하였다. 이로써 시료채취 및 분석의 단계별 불확도를 분리하여 산출한 후 측정불확도로 통합한 결과 측정값의 지역 간 연도별 농도 비교에 통계적 신뢰도 수준으로 활용할 수 있었다. 아울러 잎표면 대기침적물질 중 강우에 영향을 받는 중금속 및 PAHs 종류를 파악하기 위해 누적강우량과 오염물질의 축적도간 관계를 분석하였다. The National Environmental Specimen Bank (NESB) has been collecting broad leave samples to monitor environmental pollution from five different designated sampling areas. In order to ensure the reproducibility and comparability of the results, all the procedures from selecting trees and pooling leaves to make the representative sample are defined in the standard operation procedures(the SOP). The representative samples were subjected to the chemical analyses for some heavy minerals and Polycyclic Aromatic Hydrocarbons(PAHs). The uncertainty levels involved in each step of the SOP, that is, the sampling and the chemical analysis, were derived using the Robust ANOVA, which enables the relative comparison among the different levels of pollutants concentrations with confidence. Furthermore, the effect of the varying degrees of precipitation on the pollutants concentration of the leaves was also examined. Overall, the biological difference estimated from the duplicate samples was found to exceed the variation across the site, implying even aerial deposition over site. Samples from Gwanak Mt. showed highest heavy metal concentrations than the other sites. Washing off effect of the pollutants adhering in the form of particles on the leaf surface was found to be affected by the cumulative precipitation.