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나노 실리카분말의 충진효과를 이용한 극미세 3차원 세라믹 구조물 정밀화
임태우(T.W. Lim),박상후(S.H. Park),양동열(D.Y. Yang),Tuan Anh Pham,김동표(D.P. Kim) 한국정밀공학회 2006 한국정밀공학회 학술발표대회 논문집 Vol.2006 No.5월
A novel nanofabrication process has been developed using two-photon crosslinking (TPC) for the fabrication of threedimensional (3D) SiCN ceramic microstructures applicable to high functional 3D devices, which can be used in harsh working environments requiring a high temperature, a resistance to chemical corrosion, as well as tribological properties. After sequential processes: TPC and pyrolysis, 3D ceramic microstructures are obtained. However, large shrinkage due to low-ceramic yield during the pyrolysis is a serious problem to be solved in the precise fabrication of 3D ceramic microstructures. In this work, silica nanoparticles were employed as a filler to reduce the amount of shrinkage. In particular, the ceramic microstructures containing 40 wt% silica nanoparticles exhibited relatively isotropic shrinkage owing to its sliding free from the substrate during pyrolysis.
고열유속 전자장치에서의 비등열전달 향상을 위한 마이크로 핀 제작
임태우(T. W. Lim),유삼상(S. S. You),정석권(S. K. Jeong),박종운(J. U. Park),김준효(J. H. Kim) 한국동력기계공학회 2007 한국동력기계공학회 학술대회 논문집 Vol.- No.-
Microengineering using MEMS refers to the technologies and practice of making three dimensional structures and devices with dimensions in the order of micrometers. Eight kinds of micro fins with the dimensions of 50×60, 50×150, 100×200, 100×250, 100×300, 150×375. 200×500, 200×600 ㎛² (thickness×pitch) were fabricated on the surface of a square silicon chip with the dimensions of 20×20×0.5 ㎣ by using the wet etching technique. In cooling small devices generating high heat flux and ultra high heat flux, micro fin and micro channel heat sinks are considered an effective method. We investigate the processes fabricating micro fin which can cool the large amount of heat generated from high density devices.
다공형 전열판의 회전에 의한 열교환시스템의 성능에 관한 연구
임태우(T. W. Lim),조동현(D. H. Cho) 한국동력기계공학회 2005 한국동력기계공학회 학술대회 논문집 Vol.- No.-
The experimental investigation was carried out to evaluate the performance of air-to-air heat exchanger with rotating porous plates newly developed in this study. The rotating porous plates are mounted with an equal interval of 18 ㎜ inside the heat exchanger where the hot and cold airs enter at opposite ends. When flowing in opposite directions by the separating plate installed in the center of the rotating porous plates, the airs give and receive the heat each other. The material of the porous plate is cooper and its thickness is 1.0 ㎜. Air flow rate is varied from 10 to 120 ㎥/h. From the experiment of air-to-air heat exchanger with the rotating porous plates, the heat exchange performance increased with the increase in RPM of the porous rotating discs at the conditions of the same air flow rate. The sensible heat exchange efficiency was maximum 60 to 70 percent, and enthalpy exchange efficiency 50 to 60 percent.
3 차원 나노 스테레오리소그래피의 정밀화를 위한 펨토초 레이저 출력-조사시간 제어방법
박상후(S. H. Park),임태우(T. W. Lim),양동열(D. Y. Yang) 한국정밀공학회 2004 한국정밀공학회 학술발표대회 논문집 Vol.2004 No.10월
A scheme to control the laser power and the exposure time was studied to fabricate precise microstructures using the nanostereolithography (nSL) process. Some recent works have shown that a three-dimensional (3D) microstructure can be fabricated by the photopolymerizing process which is induced by two-photon absorption (TPA) with a femtosecond pulse laser. TPA provides the ability to confine photochemical and physical reactions within the order of laser wavelength, so neardiffraction limit features can be produced. In the nSL process, voxels are continuously generated to form a layer and then another layer is stacked in the normal direction of a plane to construct a 3D structure. Thus, fabrication of a voxel with low aspect ratio and small diameter is one of the most important parameters for fabricating precise 3D microstructures. In this work, the mechanism of a voxel formation is studied and a scheme on the control of laser power and exposure for minimizing aspect ratio of a voxel is proposed.