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나노 임프린트 장비 최적 환경을 위한 제어 장비 및 시스템에 관한 연구
박경서(Gyeong-seo Park),김우송(Woo-song Kim),임홍재(Hongjae Yim),장시열(Siyeol Jang),이기성(Keesung Lee),정재일(Jay Jeong),임시형(Sihyeong Lim),신동훈(Donghoon Shin) 대한기계학회 2008 대한기계학회 춘추학술대회 Vol.2008 No.11
Controlling of thermal environment and flow in nanoimprint process chamber is important to ensure high precision levels of products. The purpose of this paper is to build optimal nanoimprint process environment. Because of this, Optimum PI control parameter for precise temperature control has been examined. Also porous medium of ventilation system is simulated for uniform flow in the equipment chamber. The porous medium consists of mesh structure, and is installed to place which flow the influx of the air flows. PID control parameter is based on the data obtained by experiment. And then heating and cooling method which simultaneously operated was used for decreasing an error. In conclude temperature in the equipment chamber was able to control precisely in the range of ±0.1℃ by the PID control parameter and Deadband.
레진의 경화 반응을 고려한 UV-NIL 공정의 열특성에 관한 실험 및 수치해석 연구
김우송(Woo-song Kim),박경서(Gyeong-seo Park),남진현(Jinhyun Nam),임홍재(Hongjae Yim),장시열(Siyeol Jang),이기성(Keesung Lee),정재일(Jay Jeong),임시형(Sihyeong Lim),신동훈(Donghoon Shin) 대한기계학회 2008 대한기계학회 춘추학술대회 Vol.2008 No.11
The process conditions during ultraviolet nanoimprint lithography (UV-NIL) process such as temperature, stamping pressure, UV irradiation, etc. are effective factors for successful imprinting of complex and fine patterns. In this study, the effects of aluminum mold on the thermal characteristics of UV-NIL process were investigated through imprinting experiments and numerical simulations. The temperature of polymer resin on mold was measured to study thermal characteristics during UV curing. From the experimental and numerical results, the importance of curing reaction control for UV-NIL process was discussed for deformation characteristics.