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플라즈마 DLC 증착법을 이용한 실리콘 표면의 친수성 유지
이진우(Jin Woo Yi),문명운(Myoung-Woon Moon),이광렬(Kwang-Ryeol Lee),김해리(Hae-Ri Kim),김성진(Seong Jin Kim),차태곤(Tae-Gon Cha),김호영(Ho-Young Kim) 대한기계학회 2009 대한기계학회 춘추학술대회 Vol.2009 No.5
Aging behavior of wettability of Si-DLC (Si incorporated diamond-like carbon) films treated by various gas (H₂, O₂, and N₂) plasma was investigated. We found that the initially low contact angle of most plasma-treated Si-DLC surfaces recovered its high value (near 90°) within few days. However, the contact angle of Si-DLC with the Si weight fraction of 1.24 and 2.66% was measured to be below 10° as-modified, and maintained its value below 15° for 20 days. XPS analysis reveals that the polar components of Si-O bonds, enhancing hydrophilicity, have been almost unchanged over 20 days on the Si-DLC modified with oxygen plasma. Further explanation for this superior durability of the superhydrophilicity comes from observing the surface morphology evolution due to oxygen plasma treatment: nano-pillar-like structures develop on Si-DLC with the Si weight fraction of 1.24 and 2.66% due to oxygen plasma while no surface structure change is observed on films with other Si fractions.
TiC 이온 주입 층에 증착된 DLC 박막의 트라이볼로지적 특성
이진우(Jin-Woo Yi),김종국(Jong-KuK Kim),김석삼(Seock-Sam Kim) 대한기계학회 2004 대한기계학회 춘추학술대회 Vol.2004 No.4
Effects of ion implantation and deposition on the tribological properties of DLC film as a function of implanted energies and process times were investigated. TiC ions were implanted and deposited on the Si-wafer substrates followed by DLC coating using ion beam deposition method. In order to study tribological properties such as friction coefficient and behavior of DLC film on the modified surface as a function of implanted energies and process times, we used a ball-on-disc type apparatus in the atmospheric environment. From results of wear test, as the implanted energy was increased, the friction coefficient was more stable below 0.1.
Effects of Plasma Immersion Ion Implanted and deposited layer on Adhesion Strength of DLC film
Jin-Woo Yi(이진우),Jong-Kuk Kim(김종국),Seock-Sam Kim(김석삼) 한국트라이볼로지학회 2004 한국트라이볼로지학회 학술대회 Vol.39 No.-
Effects of ion implantation on the adhesion strength of DLC film as a function of ion doses and implanted energies were investigated. Ti ions were implanted on the Si-wafer substrates followed by DLC coating using ion beam deposition method. Adhesion strength of DLC films were determined by scratch adhesion tester. Morphologies and compositional variations at the different ion energies and doses were observer by Laser Microscope and Auger Electron Spectroscopy, respectively. From results of scratch test, the adhesion strength of films was improved as increasing ion implanted energy, however there was no significant evidence with ion dose.
금속 이온이 주입된 표면 개질층에 증착된 DLC 박막의 밀착력 및 트라이볼로지적 특성
이진우(Jin-Woo Yi),김종국(Jong-Kuk Kim),김석삼(Seock Sam Kim) 한국트라이볼로지학회 2003 한국트라이볼로지학회 학술대회 Vol.36 No.-
In this work, we investigated effects of ion implantation on the adhesion strength and tribological properties of Diamond-like Carbon(DLC) film as a function of ion doses and implanted energies. Ti ions were implanted on the Si-wafer substrate and then DLC films were deposited by ion beam deposition method. A CSEM-REVETEST scratch tester was used to assess the adhesion characteristics. In order to study tribological properties such as friction coefficient and behavior of DLC film. we used a ball-on-disc type apparatus in the atmosphere environment. From results, the adhesion strength of films was improved and friction coefficient was more stable below 0.1 as increasing ion implanted energy. Further results, including morphology and compositional variation at the different ion energies and doses, will be described.