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자기제한적 표면반응에 의한 ZnO 박막성장 및 기판온도에 따른 박막특성
이두형,권새롬,이석관,노승정,Lee, D.H.,Kwon, S.R.,Lee, S.K.,Noh, S.J. 한국진공학회 2009 Applied Science and Convergence Technology Vol.18 No.4
ZnO에 대한 박막증착 연구를 위하여 유도결합 플라즈마 원자층박막증착(inductively coupled plasma assisted atomic layer deposition: ICP-ALD) 장치를 제작하고, 장치에 대한 기본 공정조건을 설정하기 위하여 플라즈마를 유도하지 않은 상태에서 p-type Si(100) 기판 위에 ZnO 박막을 증착하는 다양한 실험을 수행하였다. Zn 전구체(precursor)로는 Diethyl zinc [$Zn(C_2H_5)_2$, DEZn]를, 반응가스(reaction gas)로는 $H_2O$를, 캐리어(carrier) 및 퍼지가스(purge gas)로는 Ar을 사용하였다. 기판온도 $150^{\circ}C$에서 DEZn, $H_2O$, Ar의 공급시간을 변화시켜가면서 자기제한적 표면반응(self-limiting surface reaction)에 의한 박막성장조건을 성공적으로 유도하였다. 기판온도를 변화시켜가면서($90{\sim}210^{\circ}C$) 증착실험을 반복하여, 본 장치에 대한 ALD 공정온도(thermal ALD process window)를 확립하고 성장된 ZnO박막에 대한 증착특성, 결정성, 불순물 및 내부조성비등을 조사하였다. ALD 공정온도는 기판온도 $110{\sim}190^{\circ}C$로써 이 구간에서의 박막 평균증착률은 0.29 nm/cycle로 일정하게 나타났다. 기판온도가 높아질수록 결정성이 향상되어 ZnO(002) 피크가 우세하였다. 모든 ALD 공정온도에서 Zn와 O로만 구성된 고순도의 ZnO 박막을 실현하였는데, 온도가 높아질수록 Zn와 O의 비가 1에 근접하며 안정된 hexagonal wurtzite ZnO 구조의 박막이 성장되었다. An inductively coupled plasma assisted atomic layer deposition(ICP-ALD) system has been constructed for the deposition of ZnO thin films, and various experiments of ZnO thin films on p-type Si(100) substrates have been carried out to find the self-limiting reaction conditions for the ICP-ALD system under non-plasma circumstances. Diethyl zinc[$Zn(C_2H_5)_2$, DEZn] was used as the zinc precursor, $H_2O$ as the oxidant, and Ar as the carrier and purge gas. At the substrate temperature of $150^{\circ}C$, atomic layer deposition conditions based on self-limiting surface reaction were successfully obtained by series of experiments through the variation of exposure times for DEZn, $H_2O$, and Ar. ZnO deposition was repeated at different substrate temperatures of $90{\sim}210^{\circ}C$. As a result, the thermal process window(ALD window) for ZnO thin films was observed to be $110{\sim}190^{\circ}C$ and the average growth rate was measured to be constant of 0.29 nm/cycle. Properties of the film's microstructure and composition(Zn, O, etc.) were also studied. As the substrate temperature increases, the crystallinity was improved and ZnO(002) peak became dominant. The films deposited at all temperatures were high purity, and the films deposited at high temperatures had the composition ratio between Zn and O closer to one of a stable hexagonal wurtzite structure.
Ti-Al 반사막을 이용한 405 ㎚ LED의 광추출 효율 향상
김창연(C. Y. Kim),권새롬(S. R. Kwon),이두형(D. H. Lee),노승정(S. J. Noh) 한국진공학회(ASCT) 2008 Applied Science and Convergence Technology Vol.17 No.3
Metal organic chemical vapor deposition (MOCVD)를 이용하여 사파이어 기판 위에 405 ㎚의 파장을 갖는 GaN light-emitting diode (LED)를 제작하였다. LED의 InGaN 활성층에서 생성되어 칩의 후면으로 향하는 광자를 전면으로 반사시키기 위하여. 사파이어 가판 후면에 반사막을 증착하였다. 반사막으로는 Al을 사용하였으며, 사파이어 기판에 대한 Al 박막의 접착력을 개선하기 위하여 사파이어 기판 후면에 Ti를 먼저 증착한 후에 Al을 증착하였다. Ti-Al 반사막을 채용한 결과, 광추출 효율이 52% 향상되었다. GaN-based light-emitting diodes (LEDs) of a 405 ㎚ wavelength have been fabricated on a sapphire substrate by metal organic chemical vapor deposition (MOCVD). In order to reflect the photons, which are generated in the InGaN active region and emitted to the backside, to the front surface, a reflection layer was deposited onto the back of the substrate. Aluminum was used as the reflection layer and Al was deposited on the sample followed by Ti evaporation for firm adhesion of the reflection layer to the substrate. The light extraction efficiency was enhanced 52% by adoption of the Ti-Al reflection layer.
이일용(I.Y. Lee),유새롬(S.R. Yoo),김진규(J.K. Kim),김두만(D.M. Kim) 대한기계학회 2012 대한기계학회 춘추학술대회 Vol.2012 No.11
The rubber is the most commonly used in materials in the field of tires because of special viscoelastic property. But the friction occurs when the tire constantly touches with the ground. As a result, it causes an conditions effecting to the friction-energy are the temperature, the roughness of the ground, the shape of the tread, the weight, and the materials. In this study, the analysis was preceded by considering the normal force and the horizontal velocity to the rubber. And ABAQUS/explicit was used in the analysis. The contact pressure, the shear force and the slip-distance are calculated. Then the friction-energy was derived. Basis on these results, the actual behavior of the rubber and the data were compared with each other.
논문 : 정보처리 및 복합기술 ; 살모넬라 식중독균 신속 검출용 간이 진단키트
김기영 ( G. Kim ),양길모 ( G. Yang ),박샛별 ( S. B. Park ),김용훈 ( Y. H. Kim ),이강진 ( K. J. Lee ),손재용 ( J. Y. Son ),김혁주 ( H. J. Kim ),이새롬 ( S. R. Lee ) 한국농업기계학회 2011 바이오시스템공학 Vol.36 No.2
This study was performed to develop a rapid test kit for pathogenic Salmonella in various samples. The rapid detection kit has been fabricated based on nitrocellulose lateral-flow strip. Colloidal gold and biotin conjugated Salmonella antibodies were used as a tag and a receptor, respectively. Manually spotted Salmonella antibody and Neutravidin on nitrocellulose membrane were used as test and control lines, respectively. Feasibility of the rapid kit to detect Salmonella typhimurium in samples were evaluated. The intensity of the color of the test line started to increase with the samples in which higher concentration of the cells were contained. The sensitivity of the sensor was 10(6) cfu/mL Salmonella spiked in PBS. Also, the rapid test kit could detect 10(6) cfu/mL of Salmonella in chicken meat extract.
Nu Z. N. Nguyen,Vuvi G. Tran,이새롬,김민지,Sang W. Kang,김주양,Hye J. Kim,Jong S. Lee,Hong R. Cho,권병석 대한면역학회 2020 Immune Network Vol.20 No.6
C-C chemokine receptor type 5 (CCR5) regulates the trafficking of various immune cells to sites of infection. In this study, we showed that expression of CCR5 and its ligands was rapidly increased in the kidney after systemic Candida albicans infection, and infected CCR5−/− mice exhibited increased mortality and morbidity, indicating that CCR5 contributes to an effective defense mechanism against systemic C. albicans infection. The susceptibility of CCR5−/− mice to C. albicans infection was due to impaired fungal clearance, which in turn resulted in exacerbated renal inflammation and damage. CCR5-mediated recruitment of NK cells to the kidney in response to C. albicans infection was necessary for the anti-microbial activity of neutrophils, the main fungicidal effector cells. Mechanistically, C. albicans induced expression of IL-23 by CD11c+ dendritic cells (DCs). IL-23 in turn augmented the fungicidal activity of neutrophils through GM-CSF production by NK cells. As GM-CSF potentiated production of IL-23 in response to C. albicans, a positive feedback loop formed between NK cells and DCs seemed to function as an amplification point for host defense. Taken together, our results suggest that CCR5-mediated recruitment of NK cells to the site of fungal infection is an important step that underlies innate resistance to systemic C. albicans infection.