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Sub-micrometer 크기의 패턴의 복제시 발생되는 이형 특성의 분석
이남석(Namseok Lee),강신일(Shinill Kang) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.4
With the increasing demand for plastic micro components, micro-/nano-molding using the mother stamper<br/> has received much attention. If the replication temperature is too high, the adhesion between the stamper<br/> and the polymer melt may deteriorate the surface quality of the replicated part, excessively wearing down the<br/> stamper. In this paper, an experimental method analyzes the temperature dependency of the anti-adhesion<br/> property between the actual stamper with patterns of sub-micrometer and the polymer melt. As a practical<br/> example, a correlation between the contact angle of the stamper and the surface quality of the molded<br/> substrates as a function of the replication temperature, respectively, was obtained quantitatively.
부분충진 압축성형 방식에 의한 마이크로 렌즈 어레이 제작에 관한 연구
이남석(NamSeok Lee) 한국생산제조학회 2023 한국생산제조학회지 Vol.32 No.1
In this study, the fabrication method of a microlens array was investigated using the partial-filling compression molding process. During the full-filling molding process, the sticking that occurs during the release can deteriorate the surface quality of the molded microlens. Compared to full-filling molding, partial-filling compression molding exhibits easy release owing to the minimized contact area between the mold cavity and the molded part. The microlens array was fabricated using partial molding with Ni micromold via photolithography and Ni electroforming. Finally, the microlens array was replicated using the partial molding process, with a diameter and height of 50 and 8 μm, respectively.
최성우(Sungwoo Choi),이남석(Namseok Lee),강신일(Shinill Kang) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.11
In this study, application of SAM (self-assembled monolayer) to nano replication process as an anti-adhesion layer was presented to reduce the surface energy between the nano stamper and the replicated polymeric nano patterns. To analyze wettability and adhesion force of SAM, contact angle and LFM (Lateral Force Microscopy) were measured at the actual processing temperature for the case of nano compression molding. It was found that the surface energy due to SAM deposition on the nickel nano stamper markedly decreased and the quality of SAM on the nickel stamper maintained under the actual molding environments. Additionally, an experimental method is presented to analyze the temperature dependency of the anti-adhesion property between the nano stamper and the polymer. As a practical example, a correlation between the contact angle of the stamper and the surface quality of the molded substrates as a function of the replication temperature, respectively, was obtained quantitatively. Finally, polymeric nano patterns were replicated using nano replication processes with SAM deposited metallic nano stamper. Measurement of the surface profiles and the surface roughness of the replicated polymeric nano patterns showed the usefulness of the SAM as an anti-adhesion layer in nano molding processes.