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반도체 웨이퍼 열공정에 사용되는 파워단자부의 전기-열 해석
우대성,김경준 한국마린엔지니어링학회 2017 한국마린엔지니어링학회지 Vol.41 No.9
히터 플레이트의 강건성은 웨이퍼 공정의 신뢰도에 필수적이다. 하지만, 열적으로 유발되는 고장은 히터 모듈의파워단자부에 빈번하게 발생한다. 따라서, 파워단자부의 열특성은 주의 깊게 조사되어야 하므로, 파워단자부의 유한요소해석 전기-열모델이 도출되었고, 측정에 의해 검증되었으며, 해석에 적용되었다. 모델을 활용하여 봉지재의 열전도율, 기판 두께, 발열부 면적이 열성능에 미치는 매개변수적 영향을 연구하였다. 기본 조건하의 파워단자부의 발열부는 기판대비 10K 고온이며, 1 K/mm 의 상당한 온도 구배가 발열부에서 발생됨이 밝혀졌고, 매개변수 영향 연구에 의해서는 봉지재 열전도율이 0.2 W/m-K 에서 5W/m-K 로 25배 증가해도 발열부 최대온도는 단지 0.6% 감소하는 미미한 봉지재 열전도율 영향이 밝혀졌다. 또한, 기판두께가 0.5mm에서 5mm로 증가 시 축방향 온도차는 61% 감소되는 상당한 기판 두께의영향이 발견되었다. 반면에, 발열부 면적이 3배 증가할 때 최대온도는 0.5% 감소하는 상대적으로 미미한 발열부 면적 영향이 확인되었다. Robustness of heater plates is crucial for reliable wafer processing. Nevertheless, thermally-induced failures often occur at the packaged power terminals of heater modules. Hence, the thermal behaviors of the packaged power terminals should be carefully explored. Finite element analysis electrical-thermal models of the packaged power terminals were developed, validated by measurements, and then utilized for the analysis. The models investigated parametric influences including the thermal conductivity of the encapsulant, substrate thickness, and the area of the heating element on the thermal performance. The study has found that for the nominal conditions, a 10K higher temperature of the heating element compared with the substrate and a considerable axial temperature gradient of 1K/mm have occurred. The parametric study has found a negligible effect of the thermal conductivity of the encapsulant; though the thermal conductive of the encapsulant increases by 25 times, from 0.2W/m-K to 5W/m-K, the maximum temperature of the heating element decreases by only 0.6%. The study has also found that the effect of the substrate thickness is considerable; the axial temperature difference alleviates by 61% with the increase of the substrate thickness from 0.5mm to 5mm. However, the effect of the area of the heating element is found to be relatively moderate; the maximum temperature reduces by just 0.5% with the increase of the area of the heating element by 3 times.
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기념비적 건축의 특징과 건립과정에 관한 연구 - 시드니 오페라하우스와 게이트웨이 아치의 사례를 중심으로 -
우대성,박언곤 대한건축학회 2005 대한건축학회논문집 Vol.21 No.8
This study examines the features of monumental architecture, and analyzes the primary factors of success, which appeared during the process of construction and the effects that participants had given to those factors. The building obtains the features of powerful structure which overcomes the use of platonic solid, super scale, and a technical challenge. The site condition is required to have opened spaces such as water front, for the strong symbolism and the vista. The factors of success are the unique structures with the use of contiguity field and the creative engineering that is inscribed in the building. The integration and partnership between architect and engineers lead to this success by setting up equivalent creation contribution and responsibilities for the new architecture. In this process, the administrators role in overlooking risk and carrying out the social agreement is also one important cause of this success. The monumental architecture standardizes member into a single unit for the easier experiment and consummation construct with the method of pre-fabrication. The construction process in this project obtained different conditions the time duration and the necessity in the cost escalation, which are not only effected by the architectural causes(design, technical skill) but also mostly by the other conditions(political issues, administration, the social agreement).
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우대성,한창운,윤병동,김경준 대한기계학회 2019 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.33 No.10
The temperature uniformity of heater plates (HPs) should be sustained due to critical dimension uniformity and robust operation in high temperature processing of 300 mm wafers. It is very challenging to maintain the temperature uniformity of the HP despite the dynamic control of power inputs and temperatures. The packaged power terminals (PPTs) of the HPs may considerably affect their thermal reliability. Hence, the sophisticated thermal modellings and designs of the HPs and the PPTs are necessary. In this study, the finite element analysis (FEA) thermal models of the HP and the PPT were generated, experimentally validated, and employed for the analysis and the design. The influences of the heating element width, the heating element gap, and the zone gap on the thermal performance of the HP were investigated. The parametric influences of the substrate thickness on the thermal performance of the PPT were also explored. The results show that the effect of the heating element width on the temperature of the HP is almost negligible. The results have found that a sophisticated design of the heating elements may reduce the radial temperature difference of the HP by 56 % compared with the baseline case. The results suggest that the sophisticated design may enable both the simplified structure and the enhanced temperature uniformity of the HP.
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우대성,Woo, Dae-Seung 한국건축역사학회 2006 건축역사연구 Vol.15 No.1
This study aims to identify and analyze the factors that influenced the construction of London Eye which was led by private groups, including characteristics in progress, differentiated value in design, the combination of technology and design, and construction costs. The results of this study were the followings. 1) London Eye provides a new construction method for a landmark in the downtown in that the architects became the clients of the project which might have been hoarded, procuring the construction costs and completing it by themselves. 2) London Eye presents a space utilization method where undeveloped spaces in the downtown are used in three-dimensions by erecting a structure on the river with a minimum land. 3) The process of design, production and erection is propelled the realization of technical intention design with one system and from at the initial stage, the participation of the engineer where the designer is equal with you must accompany. 4) London Eye is endowed with strong shape by a circle in design concept, which is the simplest geometrical figure, and it provides organic relationship between the past and the present by utilizing historical elements in various ways. 5) The construction was completed through four phases including idea phase, promotion phase, turn-key contract phase, and design-build phase. The most critical factor to the success is derived from the direct contact with Involved companies from the production phase. 6) In a project facing many challenges in terms of technology, the design-build method proves to be a more effective method than turn-key contract in that it may more allocate risks and enable coherent implementation of the core concept in design. The organization for the design-build method was composed of three phases including general affairs, responsible contracting by sector, and cooperative system by sector. Since that was a new concept structure, high-level contractors who hadn't had existing cooperative relationships with one another formed new cooperative relationship, while collaborating companies who had long cooperated led the responsible contracting and sub-cooperative system, which resulted in reduction of risks and time. 7) The major factors to change design were the design characteristics, derived from a technically great combination, and the opening time. 8) A new erection method was applied to London Eye, a structure that overcame the limitation in land and period, and the process of installation demonstrated that it is an important value for the construction of a landmark in the city. 9) In spite of many visitors and tremendous operational income, the factors that London Eye fails to free itself from debts include the construction costs expended double than expected, and interest burden to the investments, which occurred in the course of procuring the costs. Absolute limit in time increased the construction costs, resulting in being a great obstacle in the course of operation.
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