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W-WC의 Spark Plasma Sintering에 의한 W<sub>2</sub>C의 합성 및 식각특성
오규상,이성민,류성수,Oh, Gyu-Sang,Lee, Sung-Min,Ryu, Sung-Soo 한국분말야금학회 2020 한국분말재료학회지 (KPMI) Vol.27 No.4
W<sub>2</sub>C is synthesized through a reaction-sintering process from an ultrafine-W and WC powder mixture using spark plasma sintering (SPS). The effect of various parameters, such as W:WC molar ratio, sintering temperature, and sintering time, on the synthesis behavior of W<sub>2</sub>C is investigated through X-ray diffraction (XRD) analysis, scanning electron microscopy (SEM) analysis of the microstructure, and final sintered density. Further, the etching properties of a W<sub>2</sub>C specimen are analyzed. A W<sub>2</sub>C sintered specimen with a particle size of 2.0 ㎛ and a relative density over 98% could be obtained from a W-WC powder mixture with 55 mol%, after SPS at 1700℃ for 20 min under a pressure of 50 MPa. The sample etching rate is similar to that of SiC. Based on X-ray photoelectron spectroscopy (XPS) analysis, it is confirmed that fluorocarbon-based layers such as C-F and C-F2 with lower etch rates are also formed.