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Reliable Replication Molding Process for Robust Mushroom-Shaped Microstructures
안준형(Joon Hyung An),최지성(Ji Seong Choi),강성민(Seong Min Kang) Korean Society for Precision Engineering 2020 한국정밀공학회지 Vol.37 No.11
In this paper, we present a simple and robust fabrication method for mushroom-shaped microstructures using diverse polymers with various modulus of elasticity. Through the repeated replica molding process, we fabricated the same PDMS mushroom structure negative mold as the prepared silicon master mold. To evaluate the fabricating stability of the fabricated PDMS negative mold, the mushroom-shaped structures were replicated from the mold using six types of polymer resins with different elastic modulus and we measured superhydrophobic properties on the samples. All the fabricated samples exhibited superhydrophobicity, and we proved the structural stability of the proposed replication method through the measured SEM images, contact angles on the samples, and theoretical analysis based on the structural shape.
Micro-structure of cylindrical pillar with donut-shaped tip
Hyunjung Kim(김현정),Ji Seong Choi(최지성),Joon Hyung An(안준형),Seong Min Kang(강성민) 대한기계학회 2021 대한기계학회 춘추학술대회 Vol.2021 No.4
In this work, we offer to fabricate a micro-structure array of cylindrical pillar with donut-shaped tip, which has two functions of microchamber and omniphobic properties at once. By using MEMS process, we applied photo lithography, deep reactive etching and advantage of footing effect to fabricate cylindrical pillar with donut-shaped tip. Because of donut-shaped tip formed inside and outside cylindrical pillar, this architecture array has omniphobic properties without chemical surface treatment. In addition, the formation of a polymer roof which was induced by micro-dewetting effect gives proof of microchamber function. Eventually, we inserted micro particles in an empty space of the cylindrical pillar and covered a polymer roof on top of donut-shaped tip. We demonstrate the possibility of microchamber having polymer roof formed by micro-dewetting effect which can protect and store some materials inserted in structures. The special cylindrical pillar with donut-shaped tip of this study which show two functions simultaneously will contribute to various application fields such as micro- packaging, omniphobic surface fabrication.