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안영기,최중봉,구교욱,조중근,김태성,Ahn, Young-Ki,Choi, Jung-Bong,Koo, Kyo-Woog,Cho, Jung-Keun,Kim, Tae-Sung 한국반도체디스플레이기술학회 2009 반도체디스플레이기술학회지 Vol.8 No.1
Typically, single-wafer wet etching is done by dispensing chemical onto the front and back side of spin wafer. The wafer is fixed by a number of chuck pins, which obstruct the chemical flow and would result in the incomplete removal of the remaining film, which can become a source of contamination in the next process. In this paper, we introduce a novel design of wafer chuck, in which chuck pins are groupped into two and each group of pins fixes the substrate alternatively. Two groups of chuck pins fix the high-speed spin substrate with non contact method using a magnetic material. The actual process has been executed to observe the effectiveness of this new wafer chuck. It was found that the new wafer chuck performed better than the conventional wafer chuck for removing the remaining film from the bevel and edge side of substrate.
안영기,김현종,성보람찬,구교욱,조중근,Ahn, Young-Ki,Kim, Hyun-Jong,Sung, Bo-Ram-Chan,Koo, Kyo-Woog,Cho, Jung-Keun 한국반도체디스플레이기술학회 2006 반도체디스플레이기술학회지 Vol.5 No.2
Wet etching process in recent semiconductor manufacturing is devided into batch and single wafer type. Batch type wet etching process provides more throughput with poor etching uniformity compared to single wafer type process. Single wafer process achieves better etching uniformity by boom-swing injected chemical on rotating wafer. In this study, etching characteristics of $SiO_2$ layer at room and elevated temperature is evaluated and compared. The difference in etching rate and uniformity of each condition is identified, and the temperature profile of injected chemical is theoretically calculated and compared to that of experimental result. Better etching uniformity is observed with single wafer tool with boom-swing injection compared to single wafer process without boom-swing or batch type tool.
안영기,김현종,구교욱,조중근,Ahn, Young-Ki,Kim, Hyun-Jong,Koo, Kyo-Woog,Cho, Jung-Keun 한국반도체디스플레이기술학회 2006 반도체디스플레이기술학회지 Vol.5 No.2
Various methods of making thin film is being used in semiconductor manufacturing process. The most common method in this field includes CVD(Chemical Vapor Deposition) and PVD(Physical Vapor Deposition). Thin film is deposited on both the backside and the frontside of wafers. The thin film deposited on the backside has poor thickness profile, and can contaminate wafers in the following processes. If wafers with the thin film remaining on the backside are immersed in batch type process tank, the thin film fall apart from the backside and contaminate the nearest wafer. Thus, it is necessary to etch the backside of the wafer selectively without etching the frontside, and chemical injection nozzle positioned under the wafer can perform the backside etching. In this study, the backside chemical injection nozzle with optimized chemical injection profile is built for single wafer tool. The evaluation of this nozzle, performed on $Si_3N_4$ layer deposited on the backside of the wafer, shows the etching rate uniformity of less than 5% at the etching rate of more than $1000{\AA}$.
안영기,이채규,이진완,Ahn, Young-Ki,Lee, Chae-Gue,Lee, Jin-Wan 한국구조물진단유지관리공학회 2003 한국구조물진단유지관리공학회 논문집 Vol.7 No.3
교량의 건설계획단계에서 LCC을 고려한 의사결정이나 공용중인 교량의 체계적인 유지관리 전략을 수립하기 위해서도 최소한의 점검결과만으로 노후화를 예측할 수 있는 LCP가 필요하다. 본 연구에서는 국내외 연구결과를 토대로 무리함수 $y=\sqrt{y^2_0-at}$로 표현되는 LCP를 제안하여 국내외연구결과에서 적용한 D/B에 적용한 결과 상관계수가 0.99이상으로 노후화 경향을 표현할 수 있었으며, 전국에 분포되어 있는 슬래브교량을 대상으로 정밀점검 및 정밀안전진단의 BMS를 Fuzzy Logic을 이용하여 정량적 평가하여 회귀분석을 실시한 결과 0.81의 상관계수를 갖는 노후화 예측모델을 도출할 수 있었다. LCP(Life Cycle Profiles) of bridge structures are indispensable for the LCC(Life Cycle Cost) evaluations of bridge system. The bridge under considerations may be newly-designed one or one in service. Thus, a systematic study of LCP is essential for both reliable LCC evaluation and strategic bridge management. LCP is mainly influenced by the structural environment in nature. However, in Korea, LCC evaluation has been performed with the LCP of foreign research results or only with the pieces of professional engineers' opinion. Therefore, to alleviate the drawbacks of foreign LCP and to enhance the reliability of current LCP, LCP should be established using the available data in bridge management system(BMS). In this study, LCP along with a subset of the BMS data was investigated and several mathematical expressions were proposed and evaluated. The condition ratings of a bridge were trasformed into the numerical indices through fuzzy logics with real field data. From the numerical results, it is concluded that the mathematical LCP model of $y=\sqrt{y^2_0-at}$ is shown to be the fittest one (R=0.815) to express the condition rating varied with the age. This has been drawn from the case study of slab bridges under the similar conditions.
안영기 ( Ahn Young-ki ),이채규 ( Lee Chai-kyu ),이진완 ( Lee Jin-wan ) 한국구조물진단유지관리공학회 2003 한국구조물진단유지관리공학회 학술발표대회 논문집 Vol.7 No.2
Life cycle profiles(LCP) of bridge structures are indispensable for the life cycle cost(LCC) evaluations of bridge system. The bridge under considerations may be newly-designed one or one in service. Thus, a systematic study of LCP is essential for both reliable LCC evaluation and strategic bridge management. LCP is mainly influenced by the structural environment in nature. In this study, LCP along with a subset of the BMS data was investigated and several mathematical expressions were proposed and evaluated. From the numerical results, it is concluded that the mathematical LCP model of □□□□ is shown to be the fittest one (R=0.815) to express the condition rating varied with the age.
안영기 ( Ahn Young-ki ),정영준 ( Chung Young-jun ),전철수 ( Jeon Cheol-su ),홍수정 ( Hong Soo-jung ) 한국구조물진단유지관리공학회 2002 한국구조물진단유지관리공학회 학술발표대회 논문집 Vol.6 No.1
Traffic control due to the maintenance and repair of wearing surface on the bridge deck increases the social cost as well as the construction cost in the conventional asphalt overlay system. The aim of this study is to find the feasibility of alternatives of asphalt overlays on the bridge deck, especially the Latex Modified Concrete(LMC) overlays. This study focused on the feasibility of bridge deck overlays by comparing the strength development properties of conventional concrete and LMC. With the preliminary test results and previous researches, the mixing ratios of domestic and foreign-produced LMC were determined, respectively. Due to the ball bearing and the dispersion effect of SB latex polymer and surfactant, the workability of LMC increased in spite of the lower water cement ratio. With this workability, flexural strength and other properties such as cohesion, waterproofness, resistance to infiltration of the deicing agent, meeded for the bridge deck overlays, increased.
교량의 생애주기비용 산정을 위한 Life Cycle Profile 에 관한 연구
안영기 ( Ahn Young-ki ),정영준 ( Chung Young-jun ),이채규 ( Lee Chai-kyu ) 한국구조물진단유지관리공학회 2003 한국구조물진단유지관리공학회 학술발표대회 논문집 Vol.7 No.1
As the number of bridges requiring maintenance activities increases rapidly, it is necessary to adopt the life cycle cost analysis as a tool for optimal economical selection. Quantifying the condition assessment of indivial bridge and selecting the rational deteriorating model are essential for accurate life cycle cost analysis of bridges. In the study, a method is proposed that quantify the diagnosis results for existing bridge structures as AI(Apprarance Index), DI(Durability Index), Cl (Condition Index), LI(Load resistance Index) and TI(Total Index) using fuzzy theory. Furthermore, revised condition rating curves having linear type, parabilic type, cubic type and square root type are proposed on the basis of existing condition rating curves of domestic and foreign study. To prove the adaptability, for RC slab bridge of 180m, various indexes are calculated by fuzzy theory and the demanding rehabilitation costs for 80-year-life time are evaluated on the basis of revised condition ration curves. Considering quantification of bridge condition rating and life cycle cost analysis considering the various aspects of bridge structures are possible, the proposed method in this study will become a useful tool for life cycle cost analysis of bridge structures.
안영기 ( Ahn Young-ki ),이종빈 ( Lee Cheung-bin ),임정순 ( Yim Jung-soon ),이진완 ( Lee Jin-wan ) 한국구조물진단유지관리공학회 2003 한국구조물진단유지관리공학회 논문집 Vol.7 No.1
The purpose of this study makes a retrofit and rehabilitation practice trough the analysis and the improvement for the underlying problem of current retrofit and rehabilitation methods. Therefore, the deterioration process, the damage cause, the condition classification, the fatigue mechanism and the applied quantity of strengthening methods for slab bridge decks were analysed. Artificial neural networks are efficient computing techniqures that are widely used to solve complex problems in many fields. In this study, a back-propagation neural network model for estimating a management on existing slab bridge decks from damage cause, damage type, and integrity assessment at the initial stsge is need. The training and testing of the network were based on a database of 36. Four different network models werw used to study the ability of the neural network to predict the desirable output of increasing degree of accuracy. The neural networks is trained by modifying the weights of the neurons in response to the errors between the actual output values and the target output value. Training was done iteratively until the average sum squared errors over all the training patterms were minimized. This generally occurred after about 5,000 cycles of training.
교량의 생애주기비용 산정을 위한 Life Cycle Profile에 관한 연구
안영기(Ahn Young-Ki),정영준(Chung Young-Jun),이채규(Lee Chai-Kyu) 한국구조물진단유지관리학회 2003 한국구조물진단학회 학술발표회논문집 Vol.- No.-
As the number of bridges requiring maintenance activities increases rapidly, it is necessary to adopt the life cycle cost analysis as a tool for optimal economical selection. Quantifying the condition assessment of indivial bridge and selecting the rational deteriorating model are essential for accurate life cycle cost analysis of bridges. In the study, a method is proposed that quantify the diagnosis results for existing bridge structures as AI(Apprarance Index), DI(Durability Index), CI(Condition Index), LI(Load resistance Index) and TI(Total Index) using fuzzy theory. Furthermore, revised condition rating curves having linear type, parabilic type, cubic type and square root type ar proposed on the basis of existing condition rating curves of domestic and foreign study. To prove the adaptability, for RC slab bridge of 180m, various indexes are calculated by fuzzy theory and the demanding rehabilitation costs for 80-year-life time are evaluated on the basis of revised condition ration curves. Considering quantification of bridge condition rating and life cycle cost analysis considering the various aspects of bridge structures are possible, the proposed method in this study will become a useful tool for life cycle cost analysis of bridge structures