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진공 환경내 실시간 입자 모니터링 시스템의 개발 및 성능평가
안강호,김용민,권용택,Ahn Kang-Ho,Kim Yong-Min,Kwon Yong-Taek 한국반도체디스플레이기술학회 2006 반도체디스플레이기술학회지 Vol.5 No.1
In this paper, a new method that monitors the quantity of particles using ion-counter in vacuum environment is introduced. In-situ particle monitoring (ISPM) system is composed by Gerdien type ion-counter (house-made), DC power supply and electrometer. The ion-counter applied by positive voltage detects only positive charged particles. Therefore the particles to be detected should be in known charge state for further data analysis. ion-counter is installed at the exhaust line of process equipment where the pressure loss is structurally low. ISPM system performance has been verified with SMPS (Scanning Mobility Particle Sizer) system. The correlation coefficient is above 0.98 at the particle size range of $20{\sim}300nm$ in diameter with identified charge distribution under $0.1{\sim}10.0$ Torr.
안강호(Kang-Ho Ahn),안진홍(Jin-Hong Ahn),윤진욱(Jin-Uk Yoon),김광영(Kwang-Young Kim) 대한기계학회 2001 대한기계학회 춘추학술대회 Vol.2001 No.9
A well defined electro-spraying and electro-static precipitator(ESP) experiment is carried out to investigate the charging characteristics of the submicron particles and the monodisperse particles. The basic idea is that the highly charged electro-sprayed droplets will be exploded into smaller droplets when the Coulombic repulsive force on the surface is higher than the surface tension. During this process many highly charged smaller droplets or ions if the droplets are completely dried out will be produced in the space. These charged species will be attached to the particle and eventually charged the particles. These charged species will be easily collected with ESP. The experimental result shows that the atomizer generated particles with GMD 50㎚ is collected more than 99% even at the mean face velocity of 2.0 ㎧.
신강호(Shin Kang Ho),안병환(Ahn Byung Hwan) 한국영화학회 2008 영화연구 Vol.0 No.38
The special and technical abilities of teacher who leads educational activities depend on both preservice education and inservice education. But those activities should be learned by systematic preservice education. This means the preparation of the teacher. Therefore, this study is to develop the standard of drama and movie teacher. The contents are composed of the following 10 standards of practice for drama and movie teacher based on teacher standard of the Ministry of Education and Human Resources. The main contents are as follows. First, drama and movie teachers have a sound personality, a sense of mission and ethics, that is, desired teaching attitude. Second, drama and movie teachers are committed to the pursuit of learning and welfare such as excellence, equity, high expectation, a right to learn and so on. Third, drama and movie teachers understand processes of the cognitive, social, emotional, physical development, motivation, and need of learning of students. Fourth, drama and movie teachers understand the concept, content, principles and structure of subject matter of drama and movie to help students achieve regardless of ability. Fifth, drama and movie teachers understand how to develop and manage curricular. Sixth, drama and movie teachers understand how to select and use the instructional materials and to plan a instruction. Seventh, drama and movie teachers understand purposes and principles of evaluation to improve a learning of students. Eighth, drama and movie teachers create environment and culture to support a learning of students. Ninth, drama and movie teachers work with educational community groups to achieve educational goals. Tenth, drama and movie teachers constantly participate in educational practices and programs for the professional development and life-long learning society.