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이석윤,허명수,손동수,황병철,조동율,천희곤,오태희,송병무,송한식,이우형,이광철,김오규,권영규,구경완 경북대학교 센서기술연구소 1995 센서技術學術大會論文集 Vol.6 No.1
The thin film growing processes and the photolithographic techniques involved in the manufacturing of thin film magnetic heads are discussed. The thin film heads are composed of the hundreds of electromagnetic transducers on a single wafer and are made of Al_(2)O_(3)-TiC substrate on which Al_(2)O_(3) film as a insulating, protective layer and gap material, Cu film as a multi-turn coil and permalloy film as a magnetic material are deposited and patterned. In this article we will introduce how the thin film heads is fabricated and differ from an integrated semiconductor device. An effort is devoted to develop the formation of PR frame using a lithography process and finally the thin film heads manufacturing technologies.