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유연 힌지 구조의 스테이지 구동범위 확대를 위한 힌지의 목두께 해석
황은주(Eunjoo Hwang),민경석(Kyungsuk Min),송신형(Sinhyung Song),최우천(Woo Chun Choi) Korean Society for Precision Engineering 2005 한국정밀공학회지 Vol.22 No.5
Lever mechanisms are usually employed to enlarge output displacements in precision stages. In this study, theoretical analysis is done for a precision stage employing a lever and flexure hinges, including bending effect. This study presented relations between design parameters and magnification ratio. This study presents optimal values for the parameters to achieve a longer stage displacement. The analysis is verified by finite element analysis. It is found that adjusting stiffnesses can increase the travel range significantly.