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김영섭(Youngseop Kim),손익부(Ik-Bu Shon),노영철(Young-Chul Noh) 한국레이저가공학회 2009 한국레이저가공학회지 Vol.12 No.2
In this paper, we study experimentally the local polishing of SiO₂ surface using the CO₂ laser. For laser local polishing, we polished to remove the grooves or to be reformed the surface of grooves after forming the grooves on the material surface. We measured the reflectance, transmittance, and beam profile in order to measure the roughness of polished surface. The Atom Force Microscope (AFM) is used to measure roughness of local polishing surface. We can predict that the laser polishing contribute to the removal of generated debris and surface roughness on the micro processing.
윤지욱(Ji-Wook Yoon),설명헌(Myeng-Heon Seol),김재근(Jae-geun Kim),손익부(Ik-Bu Shon),이호(Ho Lee) 한국레이저가공학회 2008 한국레이저가공학회 학술대회 논문집 Vol.2008 No.-
Femtosecond laser machining is appropriate method for micromachining because of short pulse duration and minimizing the heat diffusion. We fabricated hologram pattern on the mold material using the femtosecond laser ablation. We machined the mold with the various fluence ranging from 3J/㎠ to 3.7J/㎠. We were able to produce the gratings on the mold material with the pitches as small as 15.um.