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반응금속 침투법으로 제조된 ${Al_2}{O_3}$/Al 복합체에서 침투방향성이 미세구조 및 접촉손상에 미치는 영향
백운규,정연길 한국세라믹학회 2000 한국세라믹학회지 Vol.37 No.9
반응금속 침투법으로 제조한 $Al_2$O$_3$/Al 복합체의 파괴특성과 손상 내구성을 침투방향성에 따라 관찰하였으며, 복합체는 $Al_2$O$_3$단일상보다 향상된 파괴인성과 Al 단일상보다 높은 경도값을 나타내었다. Vickers 압입법을 사용한 복합체의 손상형태에서는 침투방향에 따른 각각의 미세구조에 의해 상이한 특성을 나타내었으며, 헤르찌안 압입법을 사용한 복합체의 손상거동은 $Al_2$O$_3$과 Al의 중간거동을 나타내었다. 헤르찌안 압입 후 강도저하시험으로 복합체가 갖는 우수한 결함저항성을 관찰할 수 있었으며, 높은 헤르찌안 하중에서는 복합체의 강도저하 특성이 복합체의 미세구조에 의존함을 관찰할 수 있었다. 이와 함께 복합체에서의 반응금속 침투방향성, 미세구조 그리고 손상 내구성 사이 상호연관성에 대해 논의하였다.
백운규,Sang-Kyun Kim,Jea-Gun Park 한양대학교 세라믹연구소 2006 Journal of Ceramic Processing Research Vol.7 No.1
The influence of the calcination time on the physical properties of synthesized ceria particles and their subsequent influence on shallow trench isolation (STI) chemical mechanical planarization (CMP) process performance were investigated. Two different kinds of ceria particles were synthesized by a solid-state displacement method which utilized calcination times of 4 and 6 hours. After the mechanical milling process, both the crystallinity and particle size distribution of the synthesized ceria particles were found to be markedly different between particles formed with different calcination times. Due to incomplete calcination, the ceria particles synthesized with a 4-hour calcination time had a smaller crystallite size than the particles synthesized for 6 hours. This smaller crystallite size ultimately resulted in large agglomerated particles. The differences in the characteristics of the ceria particles further translated into great discrepancies between the STI CMP performances of the ceria slurries made from the two types of particles.
김명호,강상수,백운규 國立 昌原大學校 産業技術硏究所 1996 産技硏論文集 Vol.10 No.-
The defect model of nonstoichiometric rutile ( TiO₂-x ) has been studied by means of the electrical conductivity measurement as function of temperature and oxygen partial pressure(Po₂). The Po₂dependence of σindicates that the major defects in rutile are doubly charged oxygen vacancies and tetravalent charged interstitial titanium ions. The interstitial titanium Ti ??'''' prevails at temperatures above 1170˚C. But the doubly charged oxygen vacancy Vo " predominates at low Po₂and temperature under 1170˚C. The proposed defect model in rutile is consistent with our previous result which was investigated by the O?? tracer diffusion.