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아르곤 가스만을 이용하여 PES 기판 상에 성장시킨 플렉시블 유기발광소자용 비정질 IZO 애노드 박막의 특성
배정혁,문종민,정순욱,강재욱,김한기,Bae, Jung-Hyeok,Moon, Jong-Min,Jung, Soon-Wook,Kang, Jae-Wook,Kim, Han-Ki 한국전기전자재료학회 2006 전기전자재료학회논문지 Vol.19 No.12
Electrical, optical, and structural properties of indium zinc oxide (IZO) anode films grown by a RF magnetron sputtering were investigated as functions of RF power and working pressure in pure Ar ambient. To investigate electrical, optical and structural properties of IZO anode films, 4-point probe and UV/VIS spectrometry, and X-ray diffraction (XRD) were performed, respectively. A sheet resistance of $15.2{\Omega}/{\square}$, average transmittance above 80 % in visible range, expecially above 85 % in 550 nm, and root mean square roughness of 1.13 nm were obtained from optimized IZO anode films grown in oxygen free ambient. All samples show amorphous structure regardless of RF power and working pressure due to low substrate temperature. In addition, XPS depth profile obtained from IZO/PES exhibits that there is no obvious evidence of interfacial reaction between IZO and PES substrate. Furthermore, current-voltage-luminance of the flexible phosphorescent flexible OLEDs fabricated on IZO anode shows dependence on sheet resistance of the IZO anode. These results indicate that the IZO anode is a promising candidate to substitute conventional ITO anode for high-quality flexible displays.
박스 캐소드 스퍼터로 성장시킨 전면 발광 OLED용 상부 InZnO 캐소드 박막의 전기적, 광학적, 구조적 특성 연구
배정혁,문종민,김한기,Bae Jung-Hyeok,Moon Jong-Min,Kim Han-Ki 한국전기전자재료학회 2006 전기전자재료학회논문지 Vol.19 No.5
Electrical, optical, and structural properties of indium zinc oxide (IZO) films grown by a box cathode sputtering (BCS) were investigated as a function of oxygen flow ratio. A sheet resistance of $42.6{\Omega}/{\Box}$, average transmittance above 88% in visible range, and root mean spare roughness of $2.7{\AA}$ were obtained even in the IZO layers grown at room temperature. In addition, it is shown that electrical characteristics of the top-emitting organic light emitting diodes (TOLEDs) with the BCS grown-IZO top cathode layer is better than that of TOLEDs with DC sputter grown IZO top cathode, due to absence of plasma damage effect. Furthermore the effects of oxygen flow ratio in IZO films are investigated, based on x-ray photoelectron spectroscopy (XPS), ultra violet/visible (UV/VIS) spectro-meter, scanning electron microscopy (SEM), and atomic force microscopy (AFM) analysis results.
비정질 IZO 애노드를 이용한 형광 유기발광소자의 특성
문종민,배정혁,정순욱,강재욱,김한기,Moon, Jong-Min,Bae, Jung-Hyeok,Jeong, Soon-Wook,Kang, Jae-Wook,Kim, Han-Ki 한국전기전자재료학회 2006 전기전자재료학회논문지 Vol.19 No.11
We reported on characteristics of the fluorescent OLED fabricated on commercial ITO/glass and BCS grown IZO/glass substrate, respectively. The amorphous IZO anode film grown by box cathode sputtering(BCS) exhibited similar electrical and optical characteristics to commercial ITO anode even though it was deposited at room temperature. In addition, the amorphous IZO anode showed higher workfunction (5.2 eV) than that of the commercial ITO anode (5.0 eV) after ozone treatment for 10 min. Furthermore, fluorescent OLED fabricated on amorphous IZO anode film showed improved current-voltage-luminance characteristics, external quantum efficiency and power efficiency en contrast with fluorescent OLED fabricated on commercial ITO anode film. It was thought that smooth surface and high workfunction of amorphous IZO anode lead to more efficient hole injection by reduction of interface barrier height between anode and organic layers.
나노 사이즈의 Ag dot을 성막한 ITO 애노드의 오존처리에 의한 유기발광소자의 홀 주입 특성 향상
문종민,배정혁,정순욱,이민수,김한기,Moon, Jong-Min,Bae, Jung-Hyeok,Jeong, Soon-Wook,Li, Min-Su,Kim, Han-Ki 한국전기전자재료학회 2006 전기전자재료학회논문지 Vol.19 No.11
We report the enhancement of hole injection using ozone-treated Ag nanodots dispersed on indium tin oxide anode in $Ir(ppy)_3-doped$ phosphorescent OLED. Phosphorescent OLED fabricated on Ag nanodots dispersed ITO anode showed a lower turn on voltage and higher luminescence than those of OLEDS prepared commercial ITO anode. Synchrotron x-ray scattering examination results showed that the Ag nanodots dispersed on ITO anode is amorphous structure due to low deposition temperature. It was thought that decrease of the energy barrier height as Ag nanodots changed to $AgO_x$ nanodots by surface treatment using ozone for 10 min led to enhancement of hole injection in phosphorescent OLED. Futhermore, efficient hole injection can be explained by increase of contact region between anode material and organic material through introduction of $Ag_2O$ nanodots.
박스 캐소드 스퍼터로 성장시킨 고분자 유기발광소자용 비정질 IZO 애노드 박막의 특성
문종민,배정혁,정순욱,김한기,Moon Jong-Min,Bae Jung-Hyeok,Jung Soon-Wook,Kim Han-Ki 한국전기전자재료학회 2006 전기전자재료학회논문지 Vol.19 No.6
Electrical, optical, surface, and structural properties of amorphous indium-zinc-oxide (a-IZO) grown by box cathode sputtering (BCS) were compared with crystalline indium-tin-oxide (c-ITO) anode films grown by conventional DC sputtering (DCS). Although x-ray diffraction plot of BCS-grown IZO film shows amorphous structure, the optical and electrical properties of a-IZO is comparable to those of c-ITO film. In particular, BCS-grown IZO films shows very smooth surface without defects such as pin hole and cracks because most of the energy of the sputtered atoms was confined in high density plasma region in box cathode gun. Furthermore polymer organic light emitting diodes (POLED) with the a-IZO anode film shows better electrical properties than that of POLED with the c-ITO anode film due to high work function and smooth surface of a-IZO. This suggested that BCS-grown a-IZO film is promising anode materials substituting conventional c-ITO anode in OLED and flexible displays.
정지문,배정혁,김승찬,최성 호서대학교 반도체제조장비국산화연구센터 2000 학술대회 자료집 Vol.2000 No.1
최근의 코스웨어를 위한 환경은 멀티미디어 CD타이틀 제작에서 온라인 환경으로 이동해가면서 다중의 사용자가 동시 접속하여 양질의 교육을 받을 수 있는 클라이언트/서버 구조인 인터넷 환경으로 급변하고 있다. 본 코스웨어에서는 보다 현실감 있고 동적인 구현이 되도록 3차원 가상 공간의 세계를 제공하는 스크립트 언어인 VRML 2.0을 이용하여 각기 다른 학습자가 동일한 가상 역사 공간에 동시에 접속하여 학습자의 의도대로 가상 공간을 통한 역사 학습에 참여할 수 있도록 설계하였다.
비정질 IZO 애노드 박막을 이용한 유기물 플렉서블 디스플레이의 상온 제작
문종민,배정혁,정순욱,박노진,강재욱,김한기,Moon, Jong-Min,Bae, Jung-Hyeok,Jeong, Soon-Wook,Park, No-Jin,Kang, Jae-Wook,Kim, Han-Ki 한국전기전자재료학회 2006 전기전자재료학회논문지 Vol.19 No.7
We report on the fabrication of organic-based flexible displays using an amorphous IZO anode grown at room temperature. The IZO anode films were grown by a conventional DC reactive sputtering on the polycarbonate (PC) substrate at room temperature using a synthesized IZO target in a $Ar/O_2$ ambient. Both x-ray diffraction (XRD) and high resolution electron microscope (HREM) examination results show that the IZO anode film grown at room temperature Is complete amorphous structure due to low substrate temperature. A sheet resistance of $35.6\Omega/\Box$, average transmittance above 90 % in visible range, and root mean spare roughness of $6\sim10.5\AA$ were obtained even in the IZO anode film grown on PC substrate at room temperature. It is shown that the $Ir(ppy)_3$ doped flexible organic light emitting diode (OLED) fabricated on the IZO anode exhibit comparable current-voltage-luminance characteristics as well as external quantum efficiency and power efficiency to OLED fabricated on conventional ITO/Glass substrate. These findings indicate that the IZO anode film grown on PC substrate is a promising anode materials for the fabrication of organic based flexible displays.
롤투롤 스퍼터 시스템을 이용하여 PET 기판위에 성막 시킨 ITO 박막의 특성 연구
조성우,최광혁,배정혁,문종민,정진아,정순욱,박노진,김한기,Cho, Sung-Woo,Choi, Kwang-Hyuk,Bae, Jung-Hyeok,Moon, Jong-Min,Jeong, Jin-A,Jeong, Soon-Wook,Park, No-Jin,Kim, Han-Ki 한국재료학회 2008 한국재료학회지 Vol.18 No.1
The electrical, optical, structural and surface properties of an indium tin oxide (ITO) film grown on a flexible PET substrate using a specially designed roll-to-roll (R2R) sputtering system as a function of the DC power, $Ar/O_2$ flow ratio, and rolling speed is reported. It was observed that both the electrical and optical properties of the ITO film on the PET substrate were critically dependent on the $Ar/O_2$ flow ratio. In addition, x-ray diffraction examination results showed that the structure of the ITO film on the PET substrate was an amorphous structure regardless of the DC power and the $Ar/O_2$ flow ratio due to a low substrate temperature, which was maintained constant by a main cooling drum. Under optimized conditions, ITO film with resistivity of $6.44{\times}10^{-4}{\Omega}-cm$ and transparency of 86% were obtained, even when prepared at room temperature. Furthermore, bending test results exhibited that R2R-grown ITO film had good flexibility which would be applicable to flexible displays and solar cells.