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나노임프린트 리소그래피와 유연 PVA 템플릿을 이용한 렌즈 표면 moth-eye 패턴 형성에 관한 연구
배병주(B. J. Bae),홍성훈(S. H. Hong),곽신웅(S. U. Kwak),이헌(H. Lee) 한국표면공학회 2009 한국표면공학회지 Vol.42 No.2
Antireflection pattern, moth-eye structure, was fabricated on lens using Ultra Violet nanoimprint lithography and flexible template. Ni template with conical shaped structure was used as a master template to molding. The flexible poly vinyl alcohol template was fabricated by molding. This poly vinyl alcohol template was used as an imprint template of imprint at lens. Using Ultra Violet nanoimprint lithography and poly vinyl alcohol template, polymer based moth-eye structure was formed on lens and its transmittance was increased up to 94% from 92% at 550 ㎚ wavelength.
나노임프린트 리소그래피를 이용한 곡면 기판 위에 정렬된 나노 볼 패턴 형성에 관한 연구
홍성훈(S. H. Hong),배병주(B. J. Bae),곽신웅(S. U. Kwak),이헌(H. Lee) 한국표면공학회 2008 한국표면공학회지 Vol.41 No.6
The replica of highly ordered nano-sphere array patterns were fabricated using hot embossing method. First, silica nano-sphere array on Si substrate was transferred to PVC f ilm at 130℃ and 7 bar using hot embossing process. Then, silica nano-sphere array on PVC template was removed by soaking the PVC film in buffered oxide etcher. In order to form anti-stiction layer, the PVC template was coated with silicon dioxide layer and self-assembled monolayer. Through UV nanoimprint lithography with the fabricated flexible PVC template, highly ordered nano-sphere array pattern was imprinted on curved substrates with high fidelity.