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최윤석 ( Yoon-suk Choe ),배남호 ( Nam-ho Bae ),이찬구 ( Chan-goo Lee ),김도용 ( Do-yong Kim ) 한국환경기술학회 2018 한국환경기술학회지 Vol.19 No.5
본 연구에서는 기압 소자의 연구개발을 통해 수입에만 의존하던 기상 관측을 위한 정밀 기압계를 국내 기술로 만들려고 노력했다. 압저항 기압 센서의 소자는 나노기술을 활용한 MEMS 공정을 사용하여 제작하였다. 소자의 최소 선폭은 1 ㎛, 센서 선폭은 5 ㎛이다. 기압 센서는 저항 시험을 통해각 bridge 사이의 저항이 일정하다는 것이 확인되었다. 압력이 500 hPa에서 1100 hPa로 증가 할 때, 저항의 변화율은 5 Ω이었다. 그것은 기존의 외국 센서 제품에 근접하였다. 기압계는 개발된 기압소자를 기반으로 설계하여 제작하였다. 기압 측정 시험 결과, ±0.4 hPa(±0.5 hPa) 이하의 오차가 확인되었다(국내 기상기구 보정 허용 오차). 그러나 에폭시 접착 문제로 인해 시간이 지남에 따라 오차가 커지는 문제가 발생하여 향후 연구를 통해 이를 보완할 필요가 있다. In this paper, we tried to make precision barometer for meteorological observations, which was only dependent on imports with domestic technology through research and development of barometric pressure sensor. Piezoresistive pressure sensors were fabricated using MEMS process. Minimum line width is 1 ㎛, sensor line width is 5 ㎛. Through the resistance test, it was confirmed that the resistance between each bridge is uniform. When the pressure was increased from 500 hPa to 1100 hPa, the change rate of resistance was 5 Ω. It was close to that of the existing foreign sensor products. Barometer was designed and fabricated based on the barometric pressure sensor manufactured. As a result of the air pressure measurement test, it was confirmed that an error of ±0.4 hPa lower than ±0.5 hPa (Domestic meteorological instrument calibration tolerance). However, due to the epoxy adhesion problem, there is a problem that the error becomes large over time, and it is necessary to complement this part through further studies.
우수한 On/Off 저항비와 내구성을 가지는 Si CMOS-호환형 ReRAM 개발 및 전기-화학 바이오-트랜스듀서 활용
권윤아(Youna Kwon),김영준(Young-Joon Kim),심갑섭(Gapseop Sim),유동은(Dongeun Yoo),배남호(Nam Ho Bae),이경균(Kyoung Gyun Lee),안재혁(Jae-Hyuk Ahn),이종원(Jongwon Lee) 대한전자공학회 2023 대한전자공학회 학술대회 Vol.2023 No.6
In this study, ReRAM devices for electro-chemical bio applications were developed, and a biotransducer with a threshold-sensing function using the ReRAM was developed for the first time. The fabricated Si CMOS-compatible ReRAM device exhibited an excellent on/off resistance ratio of 50 with high endurance compared to the previous results. The threshold-sensing function of the implemented bio-transducer was confirmed experimentally as intended for various pHs of 0 to 10. It was also possible to change the threshold point utilizing a voltage variable function in the circuit. It is expected that this technology can be used into high-density/low-power edge-type biosensors for various infectious diseases.