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감압상태에서의 In-Situ Particle Monitor의 성능특성
배귀남,Bae, Gwi-Nam 대한기계학회 1998 大韓機械學會論文集B Vol.22 No.11
In-situ particle monitors(ISPMs) are widely used for monitoring contaminant particles in vacuum-based semiconductor manufacturing equipment. In the present research, the performance of a Particle Measuring Systems(PMS) Vaculaz-2 ISPM at subatmospheric pressures has been studied. We created uniform upstream conditions of particle concentration and measured the detection efficiency, the lower detection limit, and the size response of the ISPM using uniform sized methylene blue aerosol particles. The effect of particle size, particle velocity, particle concentration, and system pressure on the detection efficiency was examined. Results show that the detection efficiency of the ISPM decreases with decreasing chamber pressure, and with increasing mass flow rate. The lower detection limit of the ISPM, determined at 50 % of the measured maximum detection efficiency, was found to be about $0.15{\sim}0.2{\mu}m$, which is similar to the minimum detectable size of $0.17{\mu}$ given by the manufacturer.
광도가 서울 대기의 오존 생성 및 에어로졸 수 농도에 미치는 영향
배귀남,박주연,김민철,이승복,문길주,김용표 한국입자에어로졸학회 2008 Particle and Aerosol Research Vol.4 No.1
The effect of light intensity on the ozone formation and the aerosol number concentration during the photochemical reactions of ambient air was investigated in an indoor smog chamber. The smog chamber consists of a housing, 64 blacklights, and a 2.5-m3 reaction bag made of Teflon film. The bag was filled with the unfiltered ambient air in Seoul from January 10 to March 18, 2002. In this work, the photolysis rate of NO2, k1 was used as an index of light intensity. Three levels of light intensity were controlled by changing the number of blacklights turned on among 64 blacklights: 0.29 min-1 (50%), 0.44 min-1 (75%), 0.57 min-1 (100%). The ozone concentration increased rapidly within 10 minutes after irradiation irrespective of light intensity, thereafter it increased linearly during the irradiation. The ozone production rate seems to be dependent on both the light intensity and the quality of ambient air introduced into the reaction bag. The change in aerosol number concentration also depended on both the light intensity and the ambient air quality, especially aerosol size distribution. Based on the initial ambient aerosol size distributions, the photochemical potential for aerosol formation and growth is classified into two cases. One is the case showing aerosol formation and growth processes, and the other is the case showing no apparent change in particle size distribution.
배귀남 호서대학교 반도체제조장비국산화연구센터 2002 Workshop 자료집 Vol.2002 No.2
In this study, particle beams were generated at low I Pressures by using identical aerodynamic lenses, and their' shape and size were visualized by collecting uniform sized methylene blue aerosol particles on a filter media. It was found that the size of particle beams depends on the number of lens, the distance between lenses, and the downstream distance from the Final lens. The size of particle beams decreases with increasing distance between lenses, and increases with increasing downstream distance from the final lens. In the present research, the performance of a Particle Measuring Systems(PMS) Vaculaz-2 ISPM at low pressures has been studied. We generated the uniform sized methylene blue particle beams using three identical aerodynamic lenses in the center of the vacuum line, and measured the detection efficiency of the ISPM. The effects of particle size, particle concentration, mass flow rate, system pressure,.and arrangement of aerodynamic lenses on the detection efficiency of the ISPM were examined. Results show that the detection efficiency of the ISPM greatly depends on the mass flow rate, and the particle Stokes number, We also found that the optimum Stokes number ranges from 0.4 to 1.9 for the experimental conditions.
배귀남,이철희,이춘식,Bae, G.N.,Lee, C.H.,Lee, C.S. 대한설비공학회 1995 설비공학 논문집 Vol.7 No.2
In this study, thermal parameters were measured and 213 occupants were also questioned in three office buildings located in Seoul during the summer season. Predicted mean vote-predicted percentage of dissatisfied(PMV-PPD) and standard new effective temperature(SET*) were used for evaluating Korean thermal sensation. The distribution of thermal sensation vote(TSV) and percentage of dissatisfied(PD) is very similar to that of PMV and PPD. By regression analysis, the following regression equation was obtained; TSV=0.339SET*-8.583. In this case, neutral temperature and comfort range are $25.3^{\circ}C$, $23.8{\sim}26.8^{\circ}C$ respectively. Present experimental results obtained from the field study is less sensitive to the temperature change than those obtained from the climate chamber study in Korea. But, thermal sensations are similar to each other near the neutral point. The neutral temperature and comfort range obtained by this experiment are higher than those of ANSI/ASHRAE Standard 55-1974 about $1.4{\sim}1.8^{\circ}C$.
배귀남,이철희,이춘식,최항철,Bae, G.N.,Lee, C.H.,Lee, C.S.,Choi, H.C. 대한설비공학회 1995 설비공학 논문집 Vol.7 No.2
In this study, indoor thermal parameters were measured to investigate the characteristics of thermal environments and 138 occupants were questioned to evaluate Korean thermal comfort in office building in winter. Thermal sensation was estimated by using PMV(Predicted Mean Vote) and ET*(New Effective Temperature) indices. Comparing present experimental result with international standards and that of other research, Korean thermal responses were discussed. Seasonal difference between summer and winter was also discussed. It was found that TSV(Thermal Sensation Vote) is more sensitive than PMV to the variation of temperature and that the measured percentage of dissatisfied is higher than PPD(Predicted Percentage of Dissatisfied) in real office building environments. By regression analysis, the following regression equation has been obtained; TSV=0.432ET*-8.814 and neutral temperature is $20.4^{\circ}C$ in this case. Thermal comfort range based on 80% satisfaction is also $19.4{\sim}22.4^{\circ}C$.