http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
증착조건 및 열처리조건에 따른 ZrO₂ 박막의 미세구조와 전기적 특성에 관한 연구
유정호(J. H. Yoo),남석우(S. W. Nam),고대홍(D. H. Ko),오상호(S. H. Oh),박찬경(C G. Park) 한국진공학회(ASCT) 2000 Applied Science and Convergence Technology Vol.9 No.4
p형 Si (100) 기판 위에 reactive DC magnetron sputtering으로 증착한 ZrO₂ 박막에 대하여 증착조건과 열처리 조건에 따른 미세구조의 변화및 전기적 특성 변화를 관찰하였다. 증착 및 열처리 온도가 증가하고 power가 증가할수록 ZrO₂의 굴절율은 증가되어 이상적인 2.0~2.2에 근접하였다. 상온에서 증착된 ZrO₂ 박막은 비정질이며 300℃에서 증착한 경우 ZrO₂ 박막은 다결정이었다. 산소 분위기에서 열처리를 수행한 박막의 RMS 값은 증착직후보다 높아지고 계면 산화막은 산소의 확산에 의해 두께가 증가하였다. Al/ZrO₂/p-type Si (100)의 C-V과 I-V 특성을 관찰하였고, 그 결과 산소분위기에서 열처리하는 경우 계면 산화막의 두께증가로 Cmax 및 누설전류가 감소함을 알 수 있었다. We investgated the microstructures and the electrical properties of ZrO₂ thin films deposited by reactive DC magnetron sputtering on (100) Si with different deposition conditions and annealing treatments. The refractive index of the ZrO₂ thin films increased with annealing temperatures and deposition powers, and approached to the ideal value of 2.0~2.2. The ZrO₂ thin films deposited at the room temperature are amorphous, and the films are polycrystalline at the deposition temperature of 300℃. Both the thickness of the interfacial oxide layer and the root-mean-square (RMS) value of surface roughness increased upon annealing in the oxygen ambient. The Cmax value and leakage current value decreased with the increase of thickness of the interfacial oxide thickness.
반응표면모델을 이용한 한국형 고속전철 현가장치의 효율적인 최적설계
박찬경(Park, C.K.),김영국(Kim, Y.G.),배대성(Bae, D.S.),박태원(Park, T.W.) 한국소음진동공학회 2002 한국소음진동공학회 논문집 Vol.12 No.6
Computer simulation is essential to design the suspension elements of railway vehicle. By computer simulation, engineers can assess the feasibility of the given design factors and change them to get a better design. But if one wishes to perform complex analysis on the simulation, such as railway vehicle dynamic, the computational time can become overwhelming. Therefore, many researchers have used a surrogate model that has a regression model performed on a data sampling of the simulation. In general, metamodels(surrogate model) take the form y($\chi$)=f($\chi$)+$\varepsilon$, where y($\chi$) is the true output, f($\chi$) is the metamodel output, and is the error. In this paper, a second order polynomial equation is used as the RSM(response surface model) for high speed train that have twenty-nine design variables and forty-six responses. After the RSM is constructed, multi-objective optimal solutions are achieved by using a nonlinear programming method called VMM(variable matric method) This paper shows that the RSM is a very efficient model to solve the complex optimization problem.