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박종성(Jongsung Park),정규원(Kyuwon Jeong) 한국생산제조학회 2006 한국생산제조학회지 Vol.15 No.3
The ultra-precision stage is demanded for some industrial fields such as semiconductor lithography, ultra-precision machining, and fabrication of nano structure. A new stage was developed for those applications in order to obtain nano meter resolution. This stage consists of symmetric double parallelogram mechanism using flexure hinges. The mechanical properties such as strength of the flexures and deformations along the applied force were analyzed using FEM. The stage is actuated by a piezoelectric actuator and its movement was measured by a ultra-precision linear encoder. In order to improve positioning performance, a PID controller was designed based on the identified second order transfer function. Experimental results showed that this stage could be positioned within below 5 ㎚ resolution irrespective of hysteresis and creep by the controller.
박종성(Jongsung Park),정규원(Kyuwon Jeong) 한국생산제조학회 2007 한국생산제조시스템학회 학술발표대회 논문집 Vol.2007 No.10
In this paper, a nano stage which is designed is consisted of flexure hinge of notched type based in symmetric double parallelogram mechanism and piezoelectric actuator, and ultra-precision linear encoder. For a scanner like AFM, the resonant frequency is important factor in scan rate. Modal analysis was executed in order to analyze dynamic characteristic for this stage. The contact of stage and piezoelectric actuator was modeled in nonlinear contact element. The natural frequencies and mode shapes were found. Also, the frequency responses for the sinusoidal inputs was analyzed. From the bode diagram, two resonant frequencies were found. In comparison with the results by modal analysis presented many differences.
박종성(Park Jongsung),정규원(Jeong Kyuwon) 한국생산제조학회 2005 한국생산제조시스템학회 학술발표대회 논문집 Vol.2005 No.5
Recently, the ultra-precision stage is widely used in the fields of the nano-technology, special1y in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). In this paper, the ultra-precision stage which consists of flexure hinges, piezoelectric actuator, and ultra-precision linear encoder, is designed and developed. The guide mechanism which consisted of flexure hinges is analyzed by Finite Element Method. And we derived the transfer function of the system in 1st order system from step responses according to the magnitude. We performed simulation for the model to tune the control gain and applied the gains to the developed system. Experimental results found that the stage can be control1ed in 5 ㎚ resolution by PID control1er.
박종성(Jongsung Park),김창헌(Changheon Kim),이지원(Jiwon Lee),김지현(Jihyun Kim),유상혁(Sanghyuk Yoo),양범승(Bum Seung Yang) 한국태양광발전학회 2021 Current Photovoltaic Research Vol.9 No.3
In order to perform photovoltaic (PV) operation and management (O&M) efficiently, individual PV module monitoring is becoming more important. In this research, we developed wireless IoT sensor which can monitor individual photovoltaic modules. This IoT sensor can detect the output voltage, current and module temperature of individual modules and provide monitored data by wireless communication. Measured voltage error was 1.23%, and it shows 16.6 dBM, 0.42sec and 7.1 mA for voltage, transmittance output, response time and mean power consumption, respectively. IoT sensors were demonstrated in the test field with real climate environment condition and each of 5 sensors showed precise results of voltage, current and temperature. Also, sensors were compared with commercial power-optimizers and showed result difference within 5%.
주파수 응답 해석에 의한 나노 스테이지 모델링 및 강인 제어
박종성(Jongsung Park),정규원(Kyuwon Jeong) 한국생산제조학회 2007 한국생산제조시스템학회 학술발표대회 논문집 Vol.2007 No.5
The nano-stage system is widely used in some industrial fields, such as semiconductor lithography and fabrication of the nano structure. In this paper, the nano stage which is designed and fabricated is consisted of flexure hinges, piezoelectric actuator, and ultra-precision linear encoder. In order to make a system transfer function of the nano-stage system, the frequency responses for the sinusoidal inputs was analyzed. From the bode diagram, the system was modeled in 4th order system. Also, in order to have robustness for the system uncertainty and external disturbances, some weighting functions were selected and the H<SUB>∞</SUB> controller was designed by loop-shaping method. For the designed robust controller, the simulation was performed and the designed stage system was applied.