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DC 마그네트론 스퍼터링에 의해 증착한 AZO 박막의 특성
박이섭(Yi Seop Park),이승호(Seung Ho Lee),송풍근(Pung Keun Song) 한국표면공학회 2007 한국표면공학회지 Vol.40 No.3
Aluminum doped zinc oxide (AZO) films were deposited on non-alkali glass substrate by DC magnetron sputtering with 3 types of AZO targets (doped with 1.0 wt%, 2.0 wt%, 3.0 wt% Al₂O₃). Electrical, optical properties and microstructure of AZO films have been investigated by Hall effect measurements, UV/VIS/ NIR spectrophotometer, and XRD, respectively. Crystallinity of AZO films increased with increasing substrate temperature (Ts) and doping ratio of Al. Resistivity and optical transmittance in visible light were 8.8×10 ?⁴ Ω㎝ and above 85%, respectively, for the AZO film deposited using AZO target (doped with 3.0 wt% Al₂O₃) at Ts of 300℃. On the other hand, transmittance of AZO films in near-infrared region decreased with increasing Ts and doping ratio of Al, which could be attributed to the increase of carrier density.