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반도체 클린룸용 외기공조시스템의 수분무 가습을 이용한 에너지절감에 관한 연구
송원일,김기철,유경훈,신대건,태경응,김용식,박덕준,Song, Won-Il,Kim, Ki-Cheol,Yoo, Kyung-Hoon,Shin, Dae-Kun,Tae, Kyung-Eung,Kim, Yong-Sik,Park, Dug-Jun 한국입자에어로졸학회 2017 Particle and Aerosol Research Vol.13 No.2
In recent large-scale semiconductor manufacturing cleanrooms, the energy consumption in outdoor air conditioning (OAC) systems to heat, humidify, cool and dehumidify outdoor air(OA) represents about 40~50 % of the total cleanroom power consumption required to maintain cleanroom environment. Therefore, the assessment of energy consumption in outdoor air conditioning systems is essential for reducing the outdoor air conditioning load for a cleanroom. In the present study, an experiment with an outdoor air flow rate of $1,000m^3/h$ was conducted to compare the energy consumption in steam humidification, simple air washer, exhaust air heat recovery type air washer and dry cooling coil(DCC) return water heat recovery type air washer OAC systems. Besides, a numerical analysis was carried out to evaluate the annual energy consumption of the aforementioned four OAC systems. It was shown that the simple air washer, exhaust air heat recovery type air washer and DCC return water heat recovery type air washer OAC systems using water spray humidification were more energy-efficient than the steam humidification OAC system. Furthermore the DCC return water heat recovery type air washer OAC system was the most energy-efficient.