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반도체 클린룸용 외기공조시스템의 수분무 가습을 이용한 에너지절감에 관한 연구
송원일,김기철,유경훈,신대건,태경응,김용식,박덕준,Song, Won-Il,Kim, Ki-Cheol,Yoo, Kyung-Hoon,Shin, Dae-Kun,Tae, Kyung-Eung,Kim, Yong-Sik,Park, Dug-Jun 한국입자에어로졸학회 2017 Particle and Aerosol Research Vol.13 No.2
In recent large-scale semiconductor manufacturing cleanrooms, the energy consumption in outdoor air conditioning (OAC) systems to heat, humidify, cool and dehumidify outdoor air(OA) represents about 40~50 % of the total cleanroom power consumption required to maintain cleanroom environment. Therefore, the assessment of energy consumption in outdoor air conditioning systems is essential for reducing the outdoor air conditioning load for a cleanroom. In the present study, an experiment with an outdoor air flow rate of $1,000m^3/h$ was conducted to compare the energy consumption in steam humidification, simple air washer, exhaust air heat recovery type air washer and dry cooling coil(DCC) return water heat recovery type air washer OAC systems. Besides, a numerical analysis was carried out to evaluate the annual energy consumption of the aforementioned four OAC systems. It was shown that the simple air washer, exhaust air heat recovery type air washer and DCC return water heat recovery type air washer OAC systems using water spray humidification were more energy-efficient than the steam humidification OAC system. Furthermore the DCC return water heat recovery type air washer OAC system was the most energy-efficient.
반도체 클린룸용 외기공조시스템의 에너지소비량 분석 실험
송근수(Gen-Soo Song),유경훈(Kyung-Hoon Yoo),손승우(Seung-Woo Son),박덕준(Dug-Jun Park) 대한설비공학회 2011 대한설비공학회 학술발표대회논문집 Vol.2011 No.7
In recent semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems represents about 45 % of the total air conditioning load required to maintain a clean room environment. Therefore, the performance evaluation of outdoor air conditioning systems is useful for reducing the outdoor air conditioning load for a clean room. In the present study, an experiment was conducted to compare the energy consumption of steam humidification, water spray humidification, exhaust-air heat-recovery and DCC(dry cooling coil)-return-water heat-recovery outdoor air conditioning systems. It was shown from the lab-scale experiment with an outdoor air flow of 1,000 ㎥/h that the DCC-return-water heat-recovery outdoor air conditioning system was the most energy-efficient for the wintertime operation.
반도체 클린룸용 증기가습 및 수분무가습 외기공조시스템의 연간 에너지소비량 분석 수치해석
송근수(Gen-Soo Song),유경훈(Kyung-Hoon Yoo),손승우(Seung-Woo Son),박덕준(Dug-Jun Park) 대한설비공학회 2011 대한설비공학회 학술발표대회논문집 Vol.2011 No.7
In a recent large-scale semiconductor manufacturing clean room, the energy consumption of an outdoor air conditioning system to heat, humidify, cool and dehumidify incoming outdoor air represents about 45 % of the total air conditioning load required to maintain a clean room environment. In particular the energy consumption to humidify the outdoor air in wintertime is enormous. Therefore, the evaluation and comparison of the annual energy consumption of steam humidification and water spray humidification outdoor air conditioning systems has a significant meaning for reducing the outdoor air conditioning load of the clean room. In the present study, a numerical analysis was conducted to obtain the annual electric power consumption of the two outdoor air conditioning systems. It was shown from the numerical results that the water spray humidification outdoor air conditioning system exhibited lower electrical power consumption and was more energy-efficient for the wintertime operation than the steam humidification one.
배기 열회수식 에어와셔 외기공조방식 클린룸의 연간 에너지소비량 산출
김기철(Ki-Cheol Kim),유경훈(Kyung-Hoon Yoo),이관철(Gwan-Cheul Lee),신대건(Dae-Kun Shin),박덕준(Dug-Jun Park) 대한설비공학회 2013 대한설비공학회 학술발표대회논문집 Vol.2013 No.6
For a large-scale semiconductor manufacturing clean room, the energy consumed in an outdoor air conditioning system to heat, humidify, cool and dehumidify incoming outdoor air is very large. In particular, the energy requirement to humidify outdoor air in the winter season is generally known to be high. Recently, to overcome the high energy consumption nature of steam humidification, an air washer is often introduced instead of a steam generator in the conventional outdoor air conditioning system. Furthermore, from energy conservation point of view heat recovery is useful for reducing the outdoor air conditioning load. Therefore, the assessment of the annual energy consumed in the exhaust air heat recovery air washer outdoor air conditioning system deserves to be examined in order to reduce the outdoor air conditioning load of a clean room. In the present study, a numerical analysis was conducted to obtain the annual electric power consumption of the heat recovery type outdoor air conditioning system.
원제목 반도체 클린룸용 에어와셔 외기공조시스템의 에너지소비량에 관한 실험적 연구
김기철(Ki-Cheol Kim),김형태(Hyung-Tae Kim),송근수(Gen-Soo Song),유경훈(Kyung-Hoon Yoo),손승우(Seung-Woo Son),신대건(Dae-Kun Shin),박덕준(Dug-Jun Park) 대한설비공학회 2012 설비공학 논문집 Vol.24 No.4
In recent large-scale semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems to heat, humidify, cool and dehumidify incoming outdoor air represents about 45% of the total air conditioning load required to maintain a clean room environment. Therefore, the energy performance evaluation and analysis of outdoor air conditioning systems is useful for reducing the outdoor air conditioning load for a clean room. In the present study, an experiment was conducted to compare the energy consumption of outdoor air conditioning systems with a simple air washer, an exhaust air heat recovery type air washer and a DCC return water heat recovery type air washer. It was shown from the present lab-scale experiment with an outdoor air flow of 1,000 m 3 h that the exhaust air heat recovery type and DCC return water heat recovery type air washer outdoor air conditioning systems were more energy-efficient for the summer and winter operations than the simple air washer outdoor air conditi oning system and furthermore, the DCC return water heat recovery type one was the most energy-efficient in the winter operation.
반도체 클린룸용 증기가습 및 수분무가습 외기공조시스템의 에너지소비량 평가
김기철(Ki-Cheol Kim),송근수(Gen-Soo Song),김형태(Hyung-Tae Kim),유경훈(Kyung-Hoon Yoo),신대건(Dae-Kun Shin),박덕준(Dug-Jun Park) 대한설비공학회 2013 설비공학 논문집 Vol.25 No.2
For a large-scale semiconductor manufacturing clean room, the energy consumed in an outdoor air conditioning system to heat, humidify, cool and dehumidify incoming outdoor air is very large. In particular, the energy requirement to humidify outdoor air in the winter season is generally known to be high. Recently, in order to overcome the high energy consumption nature of a steam generator in a conventional steam humidification type outdoor air conditioning system, an air washer is often introduced instead of the steam generator in the outdoor air conditioning system, which can be called a water spray humidification type outdoor air conditioning system. Therefore, the assessment and comparison of the annual energy consumed in the steam humidification type and the water spray humidification type outdoor air conditioning systems deserves to be examined in order to reduce the outdoor air conditioning load of a clean room. In the present study, a numerical analysis was conducted to obtain the annual electric power consumption of the two outdoor air conditioning systems. It was shown from the comparison of the numerical results that the water spray humidification type outdoor air conditioning system can reduce about 30% of annual electric power consumption of the steam humidification type outdoor air conditioning system.