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진공공정에서의 오염입자 실시간 모니터링을 위한 광학식 센서 개발
문지훈(Jihun Mun),강상우(Sang-Woo Kang) 한국진공학회 2020 진공 이야기 Vol.7 No.1
In the past several decades, production yield and quality of the semiconductor and display process has successfully managed by introducing the advanced process control (APC) system. However, the recent technology evolution which represented as large-scale and high-density integration requires the much complicate and precise analysis of the processes for the breakthrough increasing of production yield. In this reason, the demand of developing novel real-time process monitoring sensor is increasing. We developed novel optical sensor for the real-time monitoring of contamination particles in vacuum environment. The developed sensor showed higher measurement efficiency and the weaknesses of previously developed sensors were overcame by introducing the novel measurement methods.
ISPM을 이용한 PECVD 공정 내 발생입자 측정 연구
김동빈,문지훈,김형우,강병수,윤주영,강상우,김태성,Kim, Dongbin,Mun, Jihun,Kim, HyeongU,Kang, Byung Soo,Yun, JuYoung,Kang, SangWoo,Kim, Taesung 한국입자에어로졸학회 2015 Particle and Aerosol Research Vol.11 No.4
Particles which generated from plasma enhanced chemical vapor deposition (PECVD) during thin film deposition process can affect to the process yield. By using light extinction method, ISPM can measure particles in the large-diameter pipe (${\leq}300mm$). In our research, in-situ particle monitor (ISPM) sensor was installed at the 300 mm diameter exhaust-line to count the particles in each size. In-house flange for mounting the transmitting and receiving parts of ISPM was carefully designed and installed at a certain point of exhaust line where no plasma light affect to the light extinction measurement. Measurement results of trend changes on particle count in each size can confirm that ISPM is suitable for real-time monitoring of vacuum process.
Type Ⅳ 고세장비 모듈형 수소저장용기의 충전 조건에서의 수치해석적 연구
백종택(JOONGTAK BACK),문지훈(JIHUN MUN),민지훈(JIHOON MIN),박균범(KYUNBUM PARK),기광택(KWANGTAIK KI),주성욱(SUNGWOOK JOO) 한국수소및신에너지학회 2023 한국수소 및 신에너지학회논문집 Vol.34 No.1
In this study, in order to propose a modular method for type Ⅳ high aspect ratio modular hydrogen storage vessel, a numerical analysis was conducted on the heat transfer behavior in series and parallel connection methods, and the differences according to each connection method were reviewed. Computational fluid dynamics software was used to check the internal temperature and pressure values of the hydrogen storage container under charging conditions. In terms of thermal safety when charging hydrogen gas, it was confirmed that the parallel modularization method was superior.
토크컨버터 부품 경량화에 필요한 하중 조건에 따른 Turbine drum과 burr 성형성에 대한 연구
도레미(Remi Do),신창열(Changyul Shin),문지훈(Jihun Mun),우영한(Younghan Woo),신원대(Wondae Shin) 대한기계학회 2019 대한기계학회 춘추학술대회 Vol.2019 No.11
In order to lighten the weight of automobile parts, we are carrying out research and development project to apply the torque converter parts (Turbine Drum) material by changing the weight. In addition to the weight reduction of materials and the molding properties and technology of torque converter parts (Turbine Drum) We suggest the applicability to development.