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표면탄성파 소자 응용을 위한 $LiTaO_3$ 단결정 성장
정대식,노용래,박병학,김유성,Chung, D.S.,Roh, Y.R.,Park, B.H.,Kim, Y.S. 한국결정성장학회 1994 한국결정성장학회지 Vol.4 No.2
표면탄성파 소자응요을 위하여 완전용융조성, 48.65 mole % $Li_2O에서 LiTaO_3(LT)$ 단결정(Y, X-axis)을 육성하였다. 육성된 $LiTaO_3(LT)$ 단결정의 SAW 소자성능을 확인하기 위하여 photolithography를 거쳐 기본적인 SAW filter를 제작하였다. Yamaju LT Y-cut 단결정 기판과 본 연구에서 제작된 RIST LT Y-cut 단결정 기판에서의 SAW특성결과를 비교하여 성능을 결정하였다. Yamaju LT 기판에서보다 본 연구에서 육성된 LT 단결정 기판에서 우수한 SAW 성능을 보였다. $LiTaO_3 (LT)$ single crystals (Y, X-axis) were grown from the congruent composition, 48.65 mole %, $Li_2O$ for SAW (Surface Acoustic Wave) applications. Basic SAW filters were fabricated on the RIST prepared LT wafers (Y-cut) using phtolithography. SAW filter performance was evaluated. The results were compared of the SAW characteristics between RIST prepared LT wafer (Y-cut) and commercial Yamaju wafer (Y-cut). The SAW filter prepared on the RIST grown LT wafer was shown better SAW performances than that of Yamaju wafer.
초음파 분무열분해법에 의한 CdS 박막의 제조 및 특성평가
조현민,이찬우,노용래,백성기 경북대학교 센서기술연구소 1995 센서技術學術大會論文集 Vol.6 No.1
Highly c-axis oriented CdS thin film was deposited on glass substrate by Spray Pyrolysis using Ultrasonic spray nozzle without high pressure carrier gas. We have studied the effects of substrate temperature, solution flow rate, solution concentration, nozzle power and nozzle-substrate distance. Highly c-oriented thin films were obtained at 300℃. Low temperature, low solution flow rate and low solution concentration were favored for the formation of fine microstructure. Growth of the CdS thin film was enhanced by low nozzle power, high solution flow rate and short distance of nozzle-substrate.