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김태곤(T.-G. Kim),민병권(B.-K. Min),이상조(S. J. Lee) 한국정밀공학회 2006 한국정밀공학회 학술발표대회 논문집 Vol.2006 No.5월
Simulation of micro electrical discharge machining (micro-EDM) process using finite element analysis is proposed. Multiphysics model which has three steps; heat transfer analysis, structural analysis and electric field analysis is developed for simulation. Machined surface for successive five discharges is simulated using developed multiphysics model. Machined surface roughness was simulated under two discharge conditions and the simulated results are compared with actual machined surfaces. From the comparison it is demonstrated that the model can accurately predict the machined surface with the error less than 0.5 ㎛.
후방산란법(RBS) / 양성자 여기 X-선 방출법(PIXE)을 이용한 다층자성박막의 두께 및 조성 정량분석
김태곤(T. G. Kim),전기영(G. Y. Jeon),황정남(C. N. Whang),신유하(Y. H. Shin),김영만(Y. M. Kim),송종한(J. H. Song),장성호(S. H. Jang),김광윤(K. Y. Kim) 한국자기학회 2001 韓國磁氣學會誌 Vol.11 No.6
A spin valve structure of Ta/NiFe/CoFe/Cu/CoFe/Ru/CoFe/FeMn/Ta which has a synthetic antiferromagnet (CoFe/Ru/CoFe), was fabricated by using a magnetron sputtering system. The thickness and composition of magnetic free and pinned layers affect the magnetic properties such as exchange interaction strength of each layer and so on. Even though Rutherford Backscattering Spectrometry (RBS) has advantages of quantitative and non-destructive analysis, it is almost impossible to determine the thickness and composition of magnetic thin films using RBS because of its poor mass resolution for a higher atom number (Z>20). In this study, quantitative analysis of the element composition and thickness for the spin valve sample was performed by combining both Proton Induced X-ray Emission Spectrometry (PIXE), which is one of element specific analysis techniques, and grazing-exit RES with a highly improved depth resolution and absolute quantitative analysis. For the quantitative analysis, standardization of PIXE was carried out with NiFe, CoFe, and FeMn layers, which are one of constituent layers of spin valve films. Through PIXE standardization and the aid of PIXE experimental results of the spin valve sample, the overlapped signal in a grazing-exit RBS spectrum were successfully resolved and the thickness of the Ru layer was determined with a resolution of ~1 Å.
이온 조사된 Cu / Ni / Cu(001) / Si 자성박막에 있어서 X-ray reflectivity를 이용한 계면 연구
김태곤(T. G. Kim),송종한(J. H. Song),이택휘(T. H. Lee),채근화(K. H. Chae),황현미(H. M. Hwang),전기영(G. Y. Jeon),이재용(J. Lee),정광호(K. Jeong),황정남(C. N. Whang),이준식(J. S. Lee),이기봉(K. B. Lee) 한국자기학회 2002 韓國磁氣學會誌 Vol.12 No.5
The Cu/Ni/Cu(002)/Si(100) films which have perpendicular magnetic anisotropy were deposited by e-beam evaporation methods. From the reflection high energy electron diffraction pattern, the films were confirmed to be grown epitaxially on silicon. After 2×10^(16) ions/㎠ C+ irradiation, magnetic easy-axis was changed from surface normal to in-plane as shown in the hysteresis loop of magneto-optical Kerr effects. It became manifest from analysis of X-ray reflectivity and grazing incident X-ray diffraction that even though interface between top Cu layer and Ni layer became rougher, the contrast of Cu and Ni's electron density became manifest after ion irradiation. In addition, the strain after deposition of the films was relaxed after ion irradiation. Strain relaxation related with change of magnetic properties and mechanism of intermixed layer's formation was explained by thermo-chemical driving force due to elastic and inelastic collision of ions.