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C-MEMS 기반 디바이스의 패키징을 위한 탄소 박막이 집적된 Through Silicon Via 기술 개발
곽종현(Jong-Hyun Kwak),김범상(Beomsang Kim),김신관(Shin-Kwan Kim),김건호(Gun-Ho Kim),신흥주(Heungjoo Shin) 대한기계학회 2021 대한기계학회 춘추학술대회 Vol.2021 No.11
Through silicon via (TSV) is an important component in microelectromechanical systems (MEMS) packaging used for electrical connections through a silicon chip. A widely used approach in TSV fabrication is to fill the TSV holes with metals or electrically conductive adhesives. However, they are not compatible with MEMS devices that require high temperature (e.g. C-MEMS technology including high temperature pyrolysis processes) or harsh chemical processes. In this paper, we introduce a novel method of TSV technology compatible with C-MEMS process. By sealing the top side of TSV holes with an electrically conductive thin carbon film derived by the pyrolysis of photoresist, good electrical connection through TSVs (~ 10 Ω) was secured even after C-MEMS-based humidity integration via high temperature process (~ 700 ℃).
팔라듐 전극 집적으로 국부적 pH 조정이 가능한 무효소 혈당 센서 개발
정우재(Woojae Jeong),김범상(Beomsang Kim),곽종현(Jong-Hyun Kwak),신흥주(Heungjoo Shin) 대한기계학회 2021 대한기계학회 춘추학술대회 Vol.2021 No.11
Non-enzymatic glucose sensors are attracting attention due to their thermal/chemical stability and cost-effective manufacturing. The common detection mechanism of non-enzymatic glucose sensors is based on the interaction of glucose with reactive hydrous oxide layer on metal electrode. Therefore, sufficient hydroxide ions and a large electrode surface area are advantageous for sensitive glucose detection. In this study, we present a non-enzymatic glucose sensor based on nanoporous carbon electrode with gold nanoparticle incorporated with a palladium microelectrode enabling local pH modulation; this allows for sensitive glucose detection (10-200 M) without the need for pretreatment and complex sample control device. In addition, the nanoporous carbon electrode with metal nanoparticles was fabricated at a wafer level using conventional microfabrication technologies including carbon-MEMS ensuring cost-effectiveness. The glucose sensor performance was tested by comparing glucose detection with and without pH modulation using the integrated palladium microelectrode.