실리콘 웨이퍼 에칭공정으로부터 발생(發生)된 폐산(廢酸)을 이용(利用)한 스테인리스 스틸의 산세거동(酸洗擧動) 연구(硏究)

김민석,안종관,김홍인,김주엽,안재우,Kim, Min-Seuk,Ahn, Jong-Gwan,Kim, Hong-In,Kim, Ju-Yup,Ahn, Jae-Woo 한국자원리싸이클링학회 2008 資源 리싸이클링 Vol.17 No.2

실리콘 웨이퍼 에칭공정에서 발생하는 폐산을 스테인리스 스틸 산세공정에서 재활용하고자 이를 이용한 산세 거동을 조사하였다. 폐산 원액은 $19.6g/L^{-1}$ 실리콘을 함유한 불산, 질산 및 초산의 혼산이었으며 침전법에 의한 실리콘 제거 전후 폐산들을 이용하여 304 스테인레스 스틸 표면 산화막의 제거 시 측정된 open circuit potential(OCP) 변화 거동은 매우 상이하였다. 폐산 원액을 사용한 경우에는 OCP가 높고 연속적인 변화를 보이는데 비하여 실리콘 제거 공정에서 얻어진 용액의 경우에는 불연속적인 OCP변화와 전위요동현상이 나타났다. 이러한 거동의 차이는 표면 부동태막의 형성 및 제거와 공식이 발생하는 정도의 차이에 기인하는 것으로 생각되며, 실리콘 제거 공정에서 산도가 낮아진 폐산에서 산화막 제거속도가 높고 공식발생이 현저하였다. 산세 후 시료의 표면 광택도에 가장 큰 영향을 주는 것은 산세 온도였으며, 산세온도가 높아질수록 표면 광택도는 감소하였다. 동일 산세 조건에서는 폐산 원액을 사용한 경우가 실리콘을 제거공정으로부터 얻어진 용액을 사용한 경우보다 광택도가 높았다. Pickling of oxidized 304 stainless steel has been investigated using rotating disk electrode in waste acid solutions generated from the etching process of silicon wafer in order to recycle them. The waste acid solution contained acetic, nitric, hydrofluoric acids, and silicon of $19.6g/L^{-1}$. Electrochemical behavior during the pickling was distinctively different between the original and silicon-removed acid solutions. Open circuit potential was continuously changed in the original solution, while it was discontinuously changed and fluctuated in the silicon-removed solution. Fast and abrupt removal of surface oxide layer with severe pitting was observed in the silicon-removed solution. It was found that solution temperature had the most influential effect on glossiness. Surface glossiness after pickling was decreased with solution temperature. At the same condition, the glossiness was higher in the original solution than in the silicon-removed solution.

폐의 경흉 세침흡인 세포검사

김민석,박인애,박선후,박성신,김활웅,문경철,김영아,이혜승,박기화,서정욱,이현순,함의근,Kim, Min-Suk,Park, In-Ae,Park, Sun-Hoo,Park, Sung-Shin,Kim, Hwal-Wong,Moon, Kyung-Chul,Kim, Young-Ah,Lee, Hye-Seung,Park, Ki-Wha,Seo, Jeoug-Wook,Lee, Hy 대한세포병리학회 1999 대한세포병리학회지 Vol.10 No.1

The authors analysed 2,653 cases of transthoracic fine needle aspiration cytology of the lung to evaluate the diagnostic accuracy and its limitation. A comparison was made between the original cytologic and the final histologic diagnoses on 1,149 cases from 1,074 patients. A diagnosis of malignancy was established in 38.3% benign in 48.1%, atypical lesion in 2.3%, and inadequate one in 11.9% of the cases. Statistical data on cytologic diagnoses were as follows; specificity 98.9%: sensitivity of procedure, 76.8%: sensitivity of diagnosis, 95.5%: false positive 5 cases: false negative 18 cases: predictive value for malignancy, 98.8%: predictive value for benign lesion, 79.5%: overall diagnostic efficiency, 87.5%: typing accuracy in malignant tumor, 80%.

전해생성(電解生成)된 염소(鹽素)에 의한 폐인쇄회로기판(廢印刷會路基板)으로부터 동(銅)의 침출(浸出)

김민석,이재천,정진기,김병수,김은영,Kim, Min-Seuk,Lee, Jae-Chun,Jeong, Jin-Ki,Kim, Byung-Su,Kim, Eun-Young 한국자원리싸이클링학회 2005 資源 리싸이클링 Vol.14 No.5

염산용액에서 전해생성 된 염소를 이용하여 폐프린터의 인쇄회로기판으로부터 동을 침출하는 연구를 수행하였다. 폐인쇄회로기판을 분쇄한 다음 입자크기가 $0.6{\sim}1.2mm$인 비자성 성분을 선별하여 침출실험을 행하였다. 비자성 분쇄물 중 금속성분의 평균함량은 45wt%이었으며, 동이 금속성분의 83.6wt% 이었다. 1 M 염산용액에서 전해생성된 염소에 의한 동의 침출반응은 전류밀도와 교반속도에 크게 영향을 받았다. 염산농도: 1 M, 전류밀도: $20mA/cm^2$, 침출온도: $50^{\circ}C$, 침출시간: 180분, 교반속도: 600rpm의 침출조건에서 동의 침출율은 98%로서 침출액에서 농도는 3.69g/l 해당하였다. 동의 침출반응에 대한 전해생성 된 염소의 이용율은 교반속도가 높고 인가전류밀도가 낮을 수록 높았다. 또한 침출반응 초기에는 알루미늄, 납, 주석 등의 기타금속 성분의 침출이 활발하고 동의 침출반응은 억제되었다. Electro-generated chlorine leaching of waste printed circuit boards was investigated in hydrochloric acid solutions. Non-magnetic component of $0.6{\sim}1.2mm$ was prepared by grinding, magnetic separation, and sieving. The non-magnetic component of pulverized printed circuit board contained about 45% of metal component, in which copper was about 83.6%. The leaching rate of copper was greatly affected by current density and agitation speed. The leaching of copper up to 98% was achieved at $20mA/cm^2$, $50^{\circ}C$, 180 minutes, and 600 rpm in 1M HCl solutions. Increasing agitation and lowering current density enhanced utilization efficiency of electro-generated chlorine. Leaching of copper was suppressed at the initial stage, while the minor metal elements, such as aluminum, lead, and tin, were dominantly leached out.

자동차(自動車) 폐촉매(廢觸媒)의 침출액(浸出液)으로부터 시멘테이션에 의한 백금족(白金族) 금속(金屬)의 회수(回收)

김민석,김병수,김은영,김수경,류재욱,이재천,Kim, Min-Seuk,Kim, Byung-Su,Kim, Eun-Young,Kim, Soo-Kyung,Ryu, Jae-Wook,Lee, Jae-Chun 한국자원리싸이클링학회 2011 資源 리싸이클링 Vol.20 No.4

금속분말을 환원제로 사용하는 시멘테이션에 의하여 자동차 폐촉매의 침출액과 침출잔사의 세척액으로부터 백금족 금속을 환원 석출시켜 회수하는 연구를 수행하였다. 환원제로 사용한 알루미늄, 마그네슘 그리고 아연이 백금족 금속의 시멘테이션에 미치는 영향을 조사하였으며 알루미늄을 최적 환원제로 선정하였다. 침출액에 19.3 당량의 알루미늄을 첨가하고 $50{\sim}60^{\circ}C$에서 10분간 시멘테이션을 행하였을 때 백금, 팔라듐, 로듐의 환원석출율은 각각 99.3%, 99.4%, 90.2% 정도 이었다. 또한 세척액에 알루미늄을 45 당량 투입한 후 시멘터이션 반응을 통해 백금, 팔라륨, 로듐을 각각 97%, 97%, 90% 회수할 수 있었다. 그리고 회수한 환원석출물의 금속불순물들을 질산침출로 제거함으로써 백금족 금속의 품위를 약 10% 정도 향상시킬 수 있었다. The recovery of platinum group metals (PGMs) from the leach solution of spent auto-catalyst and the wash solution of the leach residue was investigated in the laboratory scale experiments by the cementation process using metal powders as the reductant. In this study, the effect of Al, Mg and Zn powders on the cementation process was particularly examined. Aluminum powder was selected as the most suitable reductant for the cementation of PGMs. At the cementation time of 10 minute under the aluminium stoichimetric amount of 19.3 and the reaction temperature of $50{\sim}60^{\circ}C$, the recovery of platinum group metals from the leach solution of the spent auto-catalyst was found to be 99.3%, 99.4%, 90.2% for Pt, Pd and Rh, respectively. Under the same conditions with the aluminium stoichimetric amount of 45, the recovery of platinum group metals from the wash solution of the leach residue of spent catalyst was observed to be 97%, 97% and 90% for Pt, Pd and Rh, respectively. In addition, it was possible to upgrade the platinum group metals in the precipitates obtained from the cementation process by about 10% through the removal of metal impurities by the nitric acid leaching at ambient temperature.

복시환자의 임상양상

김민석,최진,김정훈,김재석,이주화,Min Seok Kim,Jin Choi,Jung Hoon Kim,Jae Suk Kim,Joo Hwa Lee 대한안과학회 2013 대한안과학회지 Vol.54 No.11

Purpose: To evaluate the clinical features, causes and outcomes of patients with diplopia. Methods: All patients presenting with diplopia from October 2010 to March 2012 and followed up for more than 3 months were retrospectively investigated. Results: During the study period, 59 patients with diplopia were identified. There were 42 males and 17 females with an average age of 50 years. Binocular diplopia accounted for 54 cases (92%) and 5 cases (8%) had monocular diplopia. Cranial nerve palsies were the most common cause of binocular diplopia (28 cases, 52%). Within the cranial nerve palsies group, 14 cases (50%) were accompanied by hypertension or diabetes mellitus. Binocular diplopia spontaneously resolved in 35 cases (65%) by 3 months rising to 41 cases (76%) by 7 months. Thirteen (93%) out of 14 cases of cranial nerve palsies with hypertension or diabetes resolved spontaneously by 3 months. Conclusions: Binocular diplopia was caused most commonly by cranial nerve palsy and resolved after 3 months in 65% of patients. A spontaneous recovery from diplopia was observed after 3 months in 93% of patients with cranial nerve palsies and microvascular disease such as hypertension or diabetes. Therefore, the initial observation without additional treatment would be sufficient in these patients. J Korean Ophthalmol Soc 2013;54(11):1772-1777

요추추간판탈출증에 대한 일반침 치료와 간접구 병행치료의 임상적 효과비교

김민석,박재연,최유진,윤경진,전재천,이태호,이은용,노정두,Kim, Min-Seok,Park, Jae-Yeon,Choi, You-Jin,Yoon, Kyoung-Jin,Jeon, Jae-Cheon,Lee, Tae-Ho,Lee, Eun-Yong,Roh, Jeong-Du 대한침구의학회 2011 대한침구의학회지 Vol.28 No.1

Objectives : The purpose of this study was to evaluate the clinical effect of indirect moxibustion treatment for HIVD patients. Methods : From March 2010 to December 2010, 32 HIVD patients who admitted to Semyung oriental medical hospital were divided into two groups. Group I was treated by indirect moxibustion and general acupuncture, group II by general acupuncture. We evaluated the treatment effect of each group with the visual analog scale(VAS) and Oswestry disability index(ODI) by dividing three period(from admission day to third day after admission, from third day to sixth day after admission and from sixth day to ninth day after admission). Results : 1. Group I was more effective than group II in VAS score reducing rate at sixth day after admission and ninth day after admission but there was no statistical significance between two groups at third day after admission 2. Group I was more effective than group II in VAS improvement rate from third day to sixth day after admission but there was no statistical significance between two groups from admission day to third day after admission and sixth day to ninth day after admission. 3. Group I was more effective than group II in ODI score reducing rate at sixth day after admission and ninth day after admission but there was no statistical significance between two groups at third day after admission. 4. In ODI improvement rate group I was higher than group II, but there was no statistical significance. Conclusions : Through this research, Indirect moxibustion treatment is considered to be effective reducing pain for HIVD(Herniated intervertebral disc) patients.

BTMSM/O₂ 고유량으로 증착된 SiOCH 박막의 2차원 상관관계 분석을 통한 유전특성 연구

김민석,황창수,김홍배,Kim, Min-Seok,Hwang, Chang-Su,Kim, Hong-Bae 한국전기전자재료학회 2008 전기전자재료학회논문지 Vol.21 No.6

We have studied the dielectric characteristics of low-k interlayer dielectric materials fabricated by PECVD for various precursor's flow rates. BTMSM precursor was introduced with the flow rates from 42 sccm to 60 sccm by 2 sccm step in the constant flow rate of 60 sccm $O_2$. The absorption intensities of Si-O-$CH_x$ bonding group and Si-$CH_x$ bonding group changed synchronously for the variation of precursor flow rate, but the intensity of Si-O-Si(C) responded asynchronously with the $CH_x$ combined bonds. The heat treatment reduced the FTIR absorption intensity of Si-O-$CH_x$ bonding group and Si-$CH_x$ bonding group but increased the intensity of Si-O-Si(C). The nanopore and free space formed by the increasement of caged link mode and cross link mode of Si-O-Si(C) group implied the origin of low-k SiOCH films.

「내외수 연계 내수침수예측시스템」 기술 소개

김민석,육지문,문영일,Kim, Min-Seok,Yuk, Ji-Mun,Mun, Yeong-Il 한국수자원학회 2017 물과 미래(한국수자원학회지) Vol.50 No.4

초소형 프로젝터를 위한 디지털 LCOS 마이크로 디스플레이의 계조 연구

김민석,강정원,Kim, Min-Seok,Kang, Jung-Won 한국반도체디스플레이기술학회 2010 반도체디스플레이기술학회지 Vol.9 No.2

A new SRAM pixel circuit with RESET Transistor of a LCOS display module was designed for a pico-projector application. A dual-block PWM method was also proposed to realize the field sequential color system having only one LCOS panel. 0.29 inch LCOS panel in SVGA resolution was fabricated and the proposed dual-block PWM method was tested with it. Discontinuity of brightness curve was caused due to multi-pulses and it was improved by the adoption of proper mapping table. With the proposed SRAM with RESET pixel circuit and dual-block PWM method, the test images were successfully demonstrated.

AWS 분(分) 단위 강우자료를 이용한 서울지역 특성에 따른 행정자치 구(區)별 목표강우량 산정에 관한 연구

김민석,손홍민,문영일,Kim, Min-seoka,Son, Hong-mina,Moon, Young-il 한국수자원학회 2016 한국수자원학회논문집 Vol.49 No.1

확률강우량은 수공구조물 설계와 도시방재를 위한 기준 등으로 활용되고 있어, 확률강우량의 산정은 매우 중요하다. 특히 소방방재청에서는 확률강우량으로 우리나라 시 군 단위로 지역방재성능목표를 설정하고 이에 대한 방재성능평가 및 방재성능목표 달성을 위한 개발계획 수립 시 활용하고 있다. 본 연구에서는 현재 시 군 단위로 설정되어 있는 목표 강우량을 구(區) 단위로 산정하고자 기상청의 지상기상관측지점(SSS, Surface Synoptic Stations)과 방재기상관측지점(AWS, Automatic Weather Stations)의 강우자료를 활용하여 지점빈도해석 및 지수홍수법을 이용한 지역빈도해석을 통해 지속시간 1시간, 2시간, 3시간 목표강우량을 산정하였다. 이는 서울지역의 지자체별 방재성능 평가 및 방재관련 업무에 참고자료로 활용할 수 있을 것으로 판단되며, 향후 방재성능목표 설정에 크게 기여할 것으로 판단된다. It is very important to decide probability precipitation that is used as hydraulic structure design and target rainfall for urban disaster prevention. Especially, National Emergency Management Agency (NAMA) announced target rainfall from probability precipitation in korea on city and district level. It make use to performance evaluation of disaster prevention and planning of development for disasters prevention capacity target. In this study was calculated target rainfall that is duration 1~3 hour based unit of gu (borough) by point and regional frequency analysis using rainfall data of Surface Synoptic Stations (SSS) and Automatic Weather Stations (AWS). The result of this study can utilized as a reference to related business such as disaster capability assessment and achievement of prevention capacity target against disasters. And it also will be contribute to establishment of prevention capacity target against disasters.