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플라즈마 화학증착법에 있어 모재의 표면조도가 TiN 박막층의 밀착력에 미치는 영향에 관하여
강해용,김문일 ( H . Y . Kang,M . I . Kim ) 한국열처리공학회 1991 熱處理工學會誌 Vol.4 No.2
The adhesion strength of TiN films to substrate(STC 3) steel has been studied using the scratch adhesion test. Before deposition, the substrates were mechanically polished and TiN films were deposited at different substrate temperature (480℃-540℃). The chemical properties of TiN films were investigated by RBS, and EDS, and the physical properties were investigated by micro-hardness tester, SEM, and X-ray diffractometer. According to results of this study, the adhesion strength of TiN films increase with increasing the deposition temperature. The roughness of the polished substrates surface were measured with a profilometer. It was observed that, as a general rule, the adhesion strength of deposited TiN films increase with decreasing the substrates surface roughness.
신영식,김문일 ( Y . S . Shin,M . I . Kim ) 한국열처리공학회 1990 熱處理工學會誌 Vol.3 No.1
In this study, TiN film was deposited onto steel by R.F.-PACVD in order to investigate the influence of parameters on the adhesion strength between film and substrate. Experimental results showed that adhesion strength by SAT is different from by optical microscopy. Adhesion strength is increased when the deposition temperature increases and is influenced by R.F. power and electrode distance. Especially heat treatment on the substrate has influenced over the adhesion strength, so it showed the 22 Newtons in adhesion strength by SAT and adhesion strength is decreased when deposition thickeness is thick and hardness is high. Also if the film is thick and high hardness simultaneous, the film was delaminated seriously.
Quenching한 SCM 440 강에서 초음파 전파특성에 미치는 템퍼링온도의 영향
이계완,김문일,박은수 ( K . W . Lee,M . I . Kim,U . S . Park ) 한국열처리공학회 1991 熱處理工學會誌 Vol.4 No.3
The effect of tempering temperature on the ultrasonic propagation velocity at SCM 440 steel quenched from 870℃ and 1000℃ has been studied by metallurgical and crystallographical observation. The measurements of ultrasonic velocity were made on the specimen by appling an immersion ultrasonic pulse-echo technique with a constant frequency of 10㎒. The quenched microstructure of this steel was a lath martensite. As the tempering temperature was increased, the martensite was transformed into the tempered martensite composed of cementite and carbide. The ultrasonic velocity increased with increasing the tempering temperature. It was thought that these were resulted from the microstructural transformation. The change of ultrasonic propagation velocity with quenching and tempering heat treatment was resulted from microstrain due to the change of internal stress. Considering these results concerning to the change of ultrasonic propagation velocity, the phenomena of microstructural transformation were estimated. Consequently, it was thought that the degree of quenching and tempered heat treatment of steel could he nondestructively evaluated with the change of ultrasonic propagation velocity.
R . F . PACD에 의하여 증착된 TiN의 경도와 밀착력에 미치는 모재 경도의 영향
김성기,김문일 ( S . K . Kim,M . I . Kim ) 한국열처리공학회 1991 熱處理工學會誌 Vol.4 No.1
This study was to investigate the influence of the substrate hardness on the hardness and adhesion of TiN thin film deposited by R. F. PACVD. Although the substrate hardness changed, chemical composition, stoichiometry and structure of TiN thin film did not change. ISE index was 1.96-1.99 for the substrate and was 1.57-1.79 for TiN thin film. And ISE index of TiN thin film was inverse proportion to the substrate hardness. When the substrate hardness was low, TiN thin film had many cracks around the indentation. But as the substrate hardness increased, TiN thin film had a few cracks and the deformation was limited within indentation. In having measured the adhesion of TiN thin film by SAT, the critical load(Lc) generally increased as the substrate hardness decreased.
플라즈마 화학증착법 ( PACVD )에 의한 TiN증착시 증착변수가 미치는 영향 (2) -TiCl4 , N2의 입력분율을 중심으로-
이병호,신영식,김문일 ( B . H . Rhee,Y . S . Shin,M . I . Kim ) 한국열처리공학회 1989 熱處理工學會誌 Vol.2 No.4
To investigate the influence of TiCl₄, N₂inlet fraction on the TiN layer, TiN film was deposited onto the STC3 and STD11 steel from gas mixtures of TiCl₄/N₂/H₂by the radio frequency plasma assisted chemical vapor deposition. The films were deposited at various TiCl₄, N₂inlet fractions. The results showed that the film thickness was increased with TiCl₄, inlet fraction. However, while the thickness was increased with N₄inlet fraction under 0.4 the thickness was decreased with increasing N₂ inlet fraction over 0.4. The density of deposited films was varied as TiCl₄, N₂ inlet fraction and its maximum value was about 5.6g/㎤. The contents of chlorine were increased with increasing TiCl₄inlet fraction and nearly constant with increasing N₂inlet fraction.
손희식,홍석호,김문일 ( H . S . Sohn,S . H . Hong,M . I . Kim ) 한국열처리공학회 1994 熱處理工學會誌 Vol.7 No.2
The purpose of this study is to clarify the influence of the reaction temperature and AlCl₃content on the aluminide coating formation on Ni-based superalloy IN713C in CVD process and to compare its throwing power with that of Pack Cementation process. Aluminide coating was formed by CVD in hot-wall stainless tube reactor from an AlCl₃-H₂mixture in the temperature range 850∼1050℃. At reaction temperature 850℃, the coating thickness and the content of aluminium at the surface were increased as AlCl₃heating temperature was raised. At reaction temperature 1050℃, they were not influenced by the variation of AlCl₃heating temperature. When AlCl₃heating temperature was fixed 125℃, the phases of the coatings were varied from Ni₂Al₃to Al-rich NiAl and to Ni-rich NiAl with the reaction temperature. Therefore, in this stucy the reaction temperature has been found to be a major factor in determining the phase formed in CVD process. The throwing power of CVD was superior to that of Pack Cementation.
플라즈마 화학증착법에서 증착변수가 TiN 증착에 미치는 영향(III) -r.f. power 및 전극간 거리를 중심으로-
김충환,신영식,김문일,Kim, C.H.,Shin, Y.S.,Kim, M.I. 한국열처리공학회 1990 熱處理工學會誌 Vol.3 No.1
To investigate the influence of r.f. power and electrode distance on the TiN deposition, TiN films were deposited onto STC3, STD11 steel and Si-wafer from gas mixtures of $TiC_4/N_2/H_2$ using the radio frequency plasma assisted chemical vapor deposition. The crystallinity of TiN film could be improved by the increase of r.f. power and the decrease of electrode distance. The TiN coated layer contains chlorine, its content were decreased with increasing r.f. power as well as decreasing electrode distance. And the thickness of deposited TiN was largely affected by r.f. power and electrode distance. The hardness of deposited TiN reached a maximum value of about Hv 2,000.
고광만,김홍우,김문일 ( K . M . Ko,H . W . Kim,M . I . Kim ) 한국열처리공학회 1991 熱處理工學會誌 Vol.4 No.4
In PECVD(Plasma-Enhanced Chemical Vapor Deposition) process, titanium nitride is thin and its adhesion is poor for the protective coatings. Therefore it has been studied that intermediate layer forms between substrate and TiN thin film. Using R.F. plasma nitriding, nitride layer was first formed, then TiN thin film coated by PECVD. The chemical composition of the coatings has been characterized using AES, EDS and their crystallographic structure by means of XRD. Mechanical properties such as microhardness and film adhesion have also been determined by vickers hardness test, scratch test and indentation test. As a result, there was no difference in chemical composition and structure between the TiN deposition only and the composite of TiN deposition on nitrided steel. It was found that nitrided substrate incresaed the hardness of TiN coatings and was beneficial in preventing the plastic deformation in the substrate. Therefore the effective load bearing capacity of the TiN coatings on nitrided steel was increased and their adhesion was improved as well. According to the results of this study, the processes that lead to the formation of composite layers characterized by good working properties, i.e., high microhardness, adhesion and resistance to deformation,
Magnetoelastic Method 를 이용한 표면 경화층의 잔류응력 평가
남옥현,이인우,김성완,김문일 ( O . H . Nam,I . W . Lee,S . W . Kim,M . I . Kim ) 한국열처리공학회 1992 熱處理工學會誌 Vol.5 No.3
Barkhausen noise(BN) is created by the abrupt changes in the magnetization of materials under applied AC magnetizing field. These changes are known to be sensitive to residual and applied stresses. In this study, BN theory was reviewed and it was examined how BN intensity was affected by simultaneous stress, hardness and microstructural changes. Also, magnetoelastic effect was used to evaluate residual stresses through carrying out the cantilever beam test. An increase in BN intensity was observed when applied and residual stress changes from compression into tension. Microstructural softening by tempering also increased the amount of BN. Therefore, the quantitative evaluation of residual stress and microstructural changes will be possible, provided BN method is more studied about various materials through comparing with different stress measuring techniques.