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γ-FIB 시스템을 이용한 산소 유량 변화에 따른 산화인듐주석 박막의 특성 연구
김동해,손찬희,윤명수,이경애,조태훈,서일원,엄환섭,김인태,최은하,조광섭,권기청,Kim, D.H.,Son, C.H.,Yun, M.S.,Lee, K.A.,Jo, T.H.,Seo, I.W.,Uhm, H.S.,Kim, I.T.,Choi, E.H.,Cho, G.S.,Kwon, G.C. 한국진공학회 2012 Applied Science and Convergence Technology Vol.21 No.6
본 연구는 RF 마그네트론 스퍼터링법을 이용하여 산소유량 변화에 따라 증착된 ITO 박막 구조적, 전기적, 광학적 특성을 분석하였다. ITO (Indium Tin Oxide) 박막은 $1.0{\times}10^{-3}$ Torr의 공정 압력과 2 kW 및 13.56 MHz의 RF 전력, 1,000 sccm의 Ar 가스 조건하에 0~12 sccm의 $O_2$ 가스 유량을 변경하면서 증착하였다. 광투과율 측정은 적분구를 이용하였으며, 측정 파장 범위는 300~1,100 nm이다. 4-point probe를 이용하여 면저항을 측정하였으며, Hall Measurement System을 이용하여 비저항, 캐리어 농도 및 전자이동도를 측정하였다. Scanning electron microscope 장비를 이용하여 ITO 박막 표면을 분석하였고, 박막의 거칠기는 Atomic force microscope을 이용하여 측정하였다. ${\gamma}$-Focused ion beam system을 이용하여 ITO 박막의 이차전자방출계수를 측정하였으며, 이차전자방출계수 값으로 Auger neutralization mechanism 분석법을 이용해 ITO 박막의 일함수를 결정하였다. 3 sccm의 산소 유량에서 증착된 ITO 박막의 비저항은 약 $2.4{\times}10^{-4}{\Omega}{\cdot}cm$로 가장 좋았으며, 광학적 특성 또한 84.93% (Weighted average)로 가장 좋은 것을 확인할 수 있었다. 이 조건에서 이차전자방출 계수가 가장 높았고 일함수는 가장 낮은 경향의 일치함을 확인하였다. Indium Tin Oxide (ITO) thin films were prepared by RF magnetron sputtering with different flow rates of $O_2$ gas from 0 to 12 sccm. Electrical and optical properties of these films were characterized and analyzed. ITO deposited on soda lime glass and RF power was 2 kW, frequency was 13.56 MHz, and working pressure was $1.0{\times}10^{-3}$ Torr, Ar gas was fixed at 1,000 sccm. The transmittance was measured at 300~1,100 nm ranges by using Photovoltaic analysis system. Electrical properties were measured by Hall measurement system. ITO thin films surface were measured by Scanning electron microscope. Atomic force microscope surface roughness scan for ITO thin films. ITO thin films secondary electron emission coefficient(${\gamma}$) was measured by ${\gamma}$-Focused ion beam. The resistivity is about $2.4{\times}10^{-4}{\Omega}{\cdot}cm$ and the weighted average transmittance is about 84.93% at 3 sccm oxygen flow rate. Also, we investigated Work-function of ITO thin films by using Auger neutralization mechanism according to secondary electron emission coefficient(${\gamma}$) values. We confirmed secondary electron emission peak at 3 sccm oxygen flow rate.
박용 발전기세트 진동 제어를 위한 강성 조절형 마운트 개발
김원현(W.H. Kim),주원호(W.H. Joo),김동해(D.H. Kim) 한국소음진동공학회 2012 한국소음진동공학회 학술대회논문집 Vol.2012 No.10
Marine diesel generator(D/G) set which is supported with resilient mounts for vibration isolation has been experienced the resonance problem by the main engine or propeller excitations and rigid body modes. Then the avoidance of resonance is difficult because the several excitations and 6 rigid body modes have to be considered simultaneously. In this paper, stiffness adjustable mounts was developed and proposed to control the natural frequencies of installed D/G set. Operating concept of the mount is that the total stiffness of mount can be changed according to the engagement of secondary rubber element in addition to primary one. The performance of mount was verified with the test rig and actual experiment in D/G set.
ITER 진공용기 중성자 빔 Liner Liner의 열ㆍ유동 설계 검증
함진기(J.K. Ham),김영기(Y.K. Kim),김동해(D.H. Kim),사정우(J.W. Sa),김병철(B.C. Kim),안희재(H.J. Ahn) 대한기계학회 2009 대한기계학회 춘추학술대회 Vol.2009 No.11
The ITER vacuum vessel provides a high quality vacuum for the plasma as well as the first confinement barrier of radioactive materials. It has upper, equatorial and lower port structures used for equipment installation, utility feedthroughs, vacuum pumping and access inside the vessel for maintenance. The neutral beam (NB) ports located side by side at two equatorial ports provide a path of neutral beam for plasma heating and current drive. An internal duct liner around the NB is built in the NB ports, and copper alloy panels are placed in the top and bottom of the liner to protect duct surface from high-power heat loads. Global NB liner models for the upper panel and the lower panel have been developed, and flow field and conjugate heat transfer analyses have been performed to find out pressure drop and heat transfer characteristics of the liner. Heat loads such as NB power, volumetric heating and surface heat flux are applied in the analyses for beam steering and misalignment conditions. For the upper panel, it is found that unbalanced flow distribution occurs in each flow path, and this causes poor heat transfer performance as well. In order to improve flow distribution and to reduce pressure losses, hydraulic analyses for modified cooling path schemes have been carried out, and design recommendation is made based on the analyses results. For the lower panel, local flow distributions and pressure drop values at each header and branch of the tube are obtained by applying design coolant flow rate. Together with the coolant flow field, temperature and heat transfer coefficient distributions are also acquired from the analyses. Based on the analysis results, it is concluded that the lower panel for the NB liner is relatively well designed even though the given heat loads are very severe.