http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
Evanohm R 합금 히터를 사용한 크로멜-콘스탄탄 다중접합 열전변환기의 제작 및 특성
이영화 ( Lee Yeong Hwa ),권성원 ( Kwon Seong Won ),김국진 ( Kim Gug Jin ),박세일 ( Park Se Il ),임영언 ( Im Yeong Eon ) 한국센서학회 2004 센서학회지 Vol.13 No.1
A thin-film multijunction thermal converter was fabricated through the process using 6 inch silicon wafer semiconductor process and bulk micromachining. Evanohm R alloy and chromel-constantan were used as a heater and thermocouple materials, respectively. The temperature coefficient of resistance of Evanohm R heater was about 75.12 ppm/℃ and the voltage sensitivity of the thermal converter indicated about 5.75 mV/mW in air. The transfer differences, measured by FRDC-DC method in the frequency range from 20 Hz to 10 kHz, showed the value under about 1.36 ppm, 0.83 ppm for the film thickness of 500, 200 nm, respectively. And in case of a 200 nm-thick thermal converter, the AC-DC transfer differences seems to be stabilized below the value of 1 ppm in the frequency range from 1 kHz to 500 kHz.