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박재윤(Park. J.P),정장근(Jung. J.G),김종석(Kim. J.S),이용길(Lee. Y.G),김광태(Kim. K.T) 한국조명·전기설비학회 2004 한국조명·전기설비학회 학술대회논문집 Vol.2004 No.5월
We studied the effect of the type of non-thermal plasma on the decomposition of CF₄. 3 types of reactors were manufactured to generate different types of plasma respectively, and went into the experiments. As the results, we found that high density of the energy of non-thermal plasma and the minimization of non-discharged area should be met in order to elevate decomposition rate of CF₄. Among the reactors used in the study, the hole-type reactor was such one that satisfying that requirement. Using the hole-type reactor, treatment efficiency for high concentration of CF₄ was excellent. We got decomposition rate of more than 95[%] between 500[ppm] around and less than 400[ppm], and up to 85[%] at 900[ppm].