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Fast Analysis of Film Thickness in Spectroscopic Reflectometry using Direct Phase Extraction
김광락,권순양,박희재 한국광학회 2017 Current Optics and Photonics Vol.1 No.1
A method for analysis of thin film thickness in spectroscopic reflectometry is proposed. In spectroscopic reflectometry, there has been a trade-off between accuracy and computation speed using the conventional analysis algorithms. The trade-off originated from the nonlinearity of spectral reflectance with respect to film thickness. In this paper, the spectral phase is extracted from spectral reflectance, and the thickness of the film can be calculated by linear equations. By using the proposed method, film thickness can be measured very fast with high accuracy. The simulation result shows that the film thickness can be acquired with high accuracy. In the simulation, analysis error is lower than 0.01% in the thickness range from 100 nm to 4 um. The experiments also show good accuracy. Maximum error is under 40 Å in the thickness range 3,000-20,000 Å. The experiments present that the proposed method is very fast. It takes only 2.6 s for volumetric thickness analysis of 640*480 pixels. The study suggests that the method can be a useful tool for the volumetric thickness measurement in display and semiconductor industries.
트리에틸아민 관능기로 가지는 음이온 교환수지의 합성과 특성
김광락,이동환,이민규,이성호,정흥석,김승일 한국공업화학회 1998 응용화학 Vol.2 No.2
A novel anion exchange resin which has triethylamine as functional group has been synthesized by the reaction of chloromethylated polystrene-divinylbenzene copolymer and triethylamine in ethanol, while commericial resin has trimethylamine as functional group. The fundamental properties such as bulk density, water content appearance index, exchange capacity, effective size, uniformity coefficient of synthesized anion exchange resin have been measured. The resin exhibited the better selectity for nitrate than sulfate in both batch and contineous column experiments.
포스터 발표 - 무기재료분과 / 전기화학분과 / 촉매분과 : 비활성 알루미나 충전컬럼에서의 수소동위원소 분리특성
김광락,강희석,백승우,이성호,안도희,이한수,정흥석 ( Kwang Rag Kim,Hee Suk Kang,Seung Woo Paek,Sung Ho Lee,Do Hee Ahn,Han Soo Lee,Hong suk Chung ) 한국공업화학회 1997 한국공업화학회 연구논문 초록집 Vol.1990 No.3
N/A In the fields of operation and handling of the hydrogen isotope facility, and of management technology for the nuclear fusion source, gas chromatography has been used as one of the practical techniques for the separation and the enrichment of hydrogen isotopic gases including tritium. Chromatographic separation experiments of the hydrogen isotope mixture (hydrogen, deuterium and tritium) were carried out by use of a commercially available gas chromatograph. An aliquot of the gas sample was injected with a specially designed vacuum sampler into the stream of inert carrier gas which goes through the separation column at liquid nitrogen temperature. The complete separation of hydrogen isotopic molecules was observed with an alumina adsorbent partially deactivated by coating with 10% manganese chloride. In addition, fairly good separation conditions without appearance of the nuclear spin isomers in a shorter retention time, which would be useful for the practical applications of the hydrogen isotope separation and enrichment, were obtained.