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박대광(Dae-kwang Park),곽남수(Nam-su Kwak),권대주(Dae-ju Kwon),김재열(Jae-yeol Kim) 한국생산제조학회 2013 한국생산제조학회지 Vol.22 No.6
With conventional positioning apparatus, it is very difficult to simultaneously achieve the desired driving range and precision at the sub-micrometer level. Generally, lead screw and friction drive, etc., have been used as servo control systems. These have large driving ranges, and high-speed positioning is feasible. In this study, we present a global servo system controlled by a laser interferometer acting as a displacement measurement sensor for achieving positioning accuracy at the sub-micrometer level.