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방진혁(J. H. Bang),권기환(K. H. Kwon),박재준(J. J. Park),조남규(N. G. Cho) 한국정밀공학회 2004 한국정밀공학회 학술발표대회 논문집 Vol.2004 No.10월
This paper presents a high sensitive force sensing module to measure machining forces for a tip-based nanopatterning instrument. The force sensing module utilizing a leaf spring mechanism and a capacitive displacement sensor has been designed to provide a measuring range from 80μN to 8N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 ㎚ resolution. The sample can be moved by a X-Y scanning motion stage with 5 ㎚ resolution. In the patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned sample was measured by AFM. Experimental results demonstrated that the developed force sensing module can be used as an effective sensing device in the nanopatterning operation.