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고삼일,부진효,정성훈,고박상희,김민수,손선영,정동근 한국진공학회 2005 Applied Science and Convergence Technology Vol.14 No.4
For the longevity of OLEDs, passivation of OLEDs is an important process step since organic materials used in OLEDs are very vulnerable to moisture. In this work, the passivation effect of the plasma polymerized para-xylene (PPpX) layers was studied. The PPpX layers deposited by PECVD were formed on top of the cathode with various plasma powers of 5090 W. Passivation effect of PPpX was significantly dependent upon the deposition plasma power of the PPpX film. The lifetime of OLEDs with the 70 W deposited PPpX passivation layer was about 5 times longer than that of the control device.
A Protective Layer on the Active Layer of Al-Zn-Sn-O Thin-Film Transistors for Transparent AMOLEDs
조두희,황치선,조경익,류민기,정성묵,윤성민,변준원,고박상희,양신혁,정우석 한국정보디스플레이학회 2009 Journal of information display Vol.10 No.4
Transparent top-gate Al-Zn-Sn-O (AZTO) thin-film transistors (TFTs) with an Al2O3 protective layer (PL) on an active layer were studied, and a transparent 2.5-inch QCIF+AMOLED (active-matrix organic light-emitting diode) display panel was fabricated using an AZTO TFT backplane. The AZTO active layers were deposited via RF magnetron sputtering at room temperature, and the PL was deposited via two different atomic-layer deposition (ALD)processes. The mobility and subthreshold slope were superior in the TFTs annealed in vacuum and with oxygen plasma PLs compared to the TFTs annealed in O2 and with water vapor PLs, but the bias stability of the TFTs annealed in O2 and with water vapor PLs was excellent.