http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
Reduction of Dry Etching Damage to PZT Films Etched with a Cl-Based Plasma and the Recovery Behavior
강명구 한국물리학회 2002 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.41 No.4
In this work, on the reduction of plasma etching damage with additive gas and the recovery of the plasma etching damage by using O2 annealing after PZT thin-film etching have been investigated. To reduce the etching damage, we etched the PZT thin films with Ar or O2 added into a Cl2/CF4 gas mixture with a mixing ratio of 8/2. The maximum etch rates of the PZT thin films were 1450 A/min for 30 % Ar added the Cl2/CF4 gas mixture with a mixing ratio of 8/2 and 1100 A/min for 10 % O2 added to that same gas mixture. In order to recover the ferroelectic properties of the PZT thin films after etching, we annealed the etched PZT thin films at 600 C in an O2 atmosphere. From the hysteresis curves and switching polarization, the reduction of the etching damage and the recovery due to the annealing is effective when O2 is added to Cl2/CF4 rather than Ar. From X-ray diffraction (XRD), the structural damage when O2 is added to Cl2/CF4 is reduced, and the improvement in the ferroelectric behavior of the annealed samples is consistent with the increased intensities of the (100) and the (200) PZT peaks. From X-ray photoelectron spectroscopy (XPS), the intensities of the Pb-O, the Zr-O, and the Ti-O peaks are changed and the chemical residue peaks are reduced due to O2 annealing. The atomic force microscopy (AFM) images show that the surface roughnesses of annealed samples are improved after etching.
강명구,손정엽,정성욱,박병건,김성수 대한이비인후과학회 2002 대한이비인후과학회지 두경부외과학 Vol.45 No.9
Pagets disease of the bone is a chronic, progresive disease of unknown etiology, characterized by abnormal bony resorption and deposition. It is a common skeletal disease in Europe and North America, while it is very rare in Asia. Pagets disease of the temporal bone has been reported to cause hearing loss, tinnitus, and mild vestibular symptom. We report a 28-year-old man with Pagets disease, which was a first reported case of bilateral sensorineural hearing loss for the first time in Korea. (Korean J Otolaryngol 2002;45:911-4)