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권현규 금오공과대학교 산업기술개발연구원 2000 産業技術開發硏究 Vol.16 No.-
In this paper presents an accurate AFM used in liquid that is free from the Z-directional distortion of a servo actuator is described. Two correction methods are employed in this AFM. One is the external-monitoring method, and the other is the in situ self-calibration method. The external-monitoring method is based on the fact that PZT actuators from the same class show similar hysteresis patterns. The same voltage signal used to control the servo actuator is applied to another PZT actuator which is termed the reference actuator. The displacement of the reference actuator is measured by a displacement sensor. As a result, the distortion of the AMF image can be corrected satisfactorily. In the in situ self-calibration method, the derivative of the calibration curve function of the PZT actuator is calculated from the profile measurement data sets which are obtained by repeating measurements after a small Z-directional shift. Input displacement at each sampling point is approximately estimated first by using a straight calibration line. The derivative is integrated with reference to the approximate input to obtain the approximate calibration curve. Then the approximation of the input value of each sampling point is improved using the obtained calibration curve. Next the integral of the derivative is improved using the newly estimated input values. As a result of repeating these improving process, the calibration curve converges to the correct one, and the distortion of the AFM image can be corrected. Principles and experimental results of the two methods are presented.
바이몰프형 PZT를 이용한 소형만능재료시험기용정밀 구동 액추에이터의 개발
권현규,최성대,정선환 한국기계가공학회 2006 한국기계가공학회지 Vol.5 No.1
This paper shows a new precision actuator of MUTM(miniature universal testing machine) for the testing of compression and tensile load on the MEMS materials and structures. The MUTM consists of a sample holder, an ultraprecision precision actuator(tranlation stage) and load sensor. The precision actuator has been developed for generating displacements with nanometer accuracy and a dynamic range of 1mm simultaneously. In this paper, it can be made by using the displacement property of bi-morph type PZT, which is able to extend the long range(stroke) according to cantilever size. However, it is not enough to be generated for compression and tensile load in miniature universal testing machine. Therefore, three dozen bi-morph type PZTs are used for generating the load. The load and displacement of the precision actuator are 35g and 0.4㎜ respectively.
모발의 나노 트라이볼러지 특성해명을 위한 원자현미경(Atomic Force Microscopy) 프로브의 개발
권현규,고언위 한국반도체디스플레이기술학회 2015 반도체디스플레이기술학회지 Vol.14 No.4
People are always pursuing the aesthetic feeling relentlessly. But some people have such problems with their hairs like alopecia, cancer chemotherapy, burns, and scalp injury. So the synthetic hair has played a very important role to make up for these deficiencies. But long term use can lead to adverse reactions or uncomfortable feeling. This is primarily caused by its properties differ with human hair. In particular, nanotribological characterizations(roughness, friction force and adhesive force) of synthetic hair surface are dissatisfy with the needs of normal hairs. This paper presents the experiments on nanotribological characterizations measurements of human hairs(coloring hair, permed hair and common hair) in shampooing condition or without shampooing condition. Using atomic force microscopy(AFM) to find out a range of synthetic hair nanotribological characterizations which can correspond with natural hair. The measurements of nanotribological characterizations focus on surface roughness, friction force and adhesive force, and a new design of AFM probe was used for measuring the nanotribological characterizations.
권현규,최성대,Kweon, Hyun-Kyu,Choi, Seong-Dae 한국기계가공학회 2003 한국기계가공학회지 Vol.2 No.1
In this paper, a new nano/micro-mechanical processing test machine was developed. This new test machine, which is based on the principle of the scanning force controlled probe microscope, can realize nano/micro-mechanical machining and in-process profile measurement. Experimental results of nano/micro indentation and scratching show that the controllable cutting depth of the test machine can be controlled by PZT actuator. Profile measurement of the machined surface has also been performed by using the test machine and a conventional AFM(Atomic Force Microscopy). A good agreement of the two measurement results have been achieved.
나노 다이아몬드 코팅박막의 기계적 특성 평가를 위한 계측시스템의 개발
권현규,이소진,권용민 한국반도체디스플레이기술학회 2019 반도체디스플레이기술학회지 Vol.18 No.1
In this study, a new adhesion evaluating equipment and data processing methods were developed to overcome some limitations of existing evaluating equipment. Nano-diamond coated tool is a specimen of experiment. When applying frictional force and shear force on the specimen by a rotating polishing pad, delamination occurs at a moment. During each experiment, the vibration, load, and torque is obtained by accelerometer, loadcell and torque sensor. Frictional force and coefficient of friction are obtained by calculating torque and load. Based on FFT transformation, acceleration is processed and analyzed. As a result, the moment of delamination and the load at that time can be detected by the new developed equipment and measurement system. Finally, we call this load as an Adhesion force.
가공면미세결함의 나노 인프로세스 측정을 위한 AFM시스템의 개발
권현규,최성대,박무훈,Gwon, Hyeon-Gyu,Choe, Seong-Dae,Park, Mu-Hun 대한기계학회 2002 大韓機械學會論文集A Vol.26 No.3
This paper examines a new in-process measurement system for the measurement of micro-defects on the surfaces of brittle materials by using the AFM (Atomic Force Microscopy). A new AFM scanning stage that can also perform nano-scale bending of the sample was developed by adding a bending unit to a commercially available AFM scanner. The bending unit consists of a PZT actuator and sample holder, and can perform static and cyclic three-point bending. The true bending displacement of the bending unit is approximately 1.8mm when 80 volts are applied to the PZT actuator. The frequency response of the bending unit and the stress on the sample were also analyzed, both theoretically and experimentally. Potential surface defects of the sample were successfully detected by this measurement system. It was confirmed that the number of micro-defects on a scratched surface increases when the surface is subjected to a cyclic bending load.