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반도체 라인의 효율적 계측을 위한 자동 계측 샘플링 방식에 관한 연구
김태엽(Tae Yeob Kim),선동석(Dong Seok Sun),이지형(Jee?Hyung Lee) 대한전기학회 2009 전기학회논문지 Vol.58 No.12
Semiconductor processes need measurement to confirm where there are problems in quality after progresses manufacturing process. This paper suggests equipment and automatic measure sampling method that control monitoring ratio according to change point occurrence availability of process that is not measure method by the existent simple ratio rate. This paper defines measure section as ailment section, metastable section and stability section by change point standard and create statistical model of each section and developed suitable measure rate model by section. As a result, we have accomplished maximum throughput and minimum sampling number that needs to maintain constant level of quality. Proposed method minimizes load of measure process by brings production quality sophistication and decrease of process badness and lowers measure rate in stable section making perception about problem occurrence quick heightening measure rate at change point occurrence.
FAB-Wide 스케줄링을 통한 반도체 연구라인의 운용 최적화
金暎昊(Young-Ho Kim),李知炯(Jee-Hyong Lee),宣東錫(Dong-Seok Sun) 대한전기학회 2008 전기학회논문지 Vol.57 No.4
Semiconductor research and development (R&D) fabs are very different than production fabs in many ways such as the scales of production, job priority, production methods, and performance measures. Efficient operations of R&D fabs are very important to the development of new product, process stability, high yield, and ultimately company competitiveness. This paper proposes the fab-wide scheduling method for operational optimization of the R&D fabs. Most scheduling systems of semiconductor fabs have only focused on maximizing throughput of each separated areas without considering WIP(works in process) flows of entire fab. In this paper, we proposes the a fab-wide scheduling system which schedules all lots to entire fab equipment at once. We develop the MIP(mixed integer programing) model which allocates the lots to production equipment considering many constraints of all processes and the CP(constraint programming) model which determines the sequences of the lots in the production equipment. The proposed FAB-wide scheduling model is applied to the newly constructed R&D fab. As a result, we have accomplished the system based automated job reservation, decrease of the hot lot delay, increase of the queue time satisfaction, the high throughput by maximizing the batch sizes, decrease of the WIP TAT(Tum Around Time).