ECR plasma로 전처리된 Cu seed층 위에 전해도금 된 Cu 막에 대한 Annealing의 효과

이한승,권덕렬,박현아,이종무,Lee, Han-seung,Kwon, Duk-ryel,Park, Hyun-ah,Lee, Chong-mu 한국재료학회 2003 한국재료학회지 Vol.13 No.3

Thin copper films were grown by electrodeposition on copper seed layers which were grown by sputtering of an ultra-pure copper target on tantalum nitride-coated silicon wafers and subsequently, cleaned in ECR plasma. The copper films were then subjected to ⅰ) vacuum annealing, ⅱ) rapid thermal annealing (RTA) and ⅲ) rapid thermal nitriding (RTN) at various temperatures over different periods of time. XRD, SEM, AFM and resistivity measurements were done to ascertain the optimum heat treatment condition for obtaining film with minimum resistivity, predominantly (111)-oriented and smoother surface morphology. The as-deposited film has a resistivity of ∼6.3 $\mu$$\Omega$-cm and a relatively small intensity ratio of (111) and (200) peaks. With heat treatment, the resistivity decreases and the (111) peak becomes dominant, along with improved smoothness of the copper film. The optimum condition (with a resistivity of 1.98 $\mu$$\Omega$-cm) is suggested as the rapid thermal nitriding at 400oC for 120 sec.

분말혼화제를 사용한 콘크리트 포장(包裝)화에 관한 기초적 연구

한다희,김영주,박무영,박희곤,이영도,정상진 대한건축학회 2004 대한건축학회 학술발표대회 논문집 - 계획계/구조계 Vol.24 No.1(구조계)

Most concrete is recently made of an aggregate which is properly absorbed, and carried in it according to its capability at every fields. We have been close to demand new capability of high flowing and enduring for specific concretes. That is difficult to cope with claiming the efficiency on deterioration from lack of a high quality aggregate. Therefore, For solving the problems we apply to method of packaged dry combined materials for concrete using dried materials. That is to say that it is a kind of making into an instant. In this study, There is a purpose to present fundamental data, comparing and analyzing a phenomenon of aggregate's absorption following the rate of adding water, for using existing materials.

해상 누유 확산 예측 프로그램의 개발

韓成義,宋武錫 홍익대학교 산업기술연구소 1995 産業技術 Vol.5 No.-

We investigated various oil-spill models and condensed the integrated information into a prediction model which is applicable to Korean Yellow sea coastal area. As pre- and post -processor of the develope system we adopted an available commercial package. OILMAP which is developed by ASA. Various environmental data can be input through easy menu functions and the current data can also be included as and output from two-dimensiona depth averaged N-S calculations. For the fate of the spilt oil we included effects of spreading advection evaporation dispersion emulsification shoreline interaction and recovery actions such as by using oil fences and skimmers. The developed oil-spill prediction system demonstrates its fast, reliable and robust functioning as an easy handing on-site oil recovery tool.

독일통일과정에서 농협의 역할( I )

한스 뭔크너,김연석 농업협동조합중앙회 2000 농협조사월보 Vol.519 No.-

독일통일과정에서 농협의 역할( II )

한스 뮌크너,김연석 농업협동조합중앙회 2001 농협조사월보 Vol.520 No.-

Si 기판 위에 CeO_2 유전체 박막 성장

한재원,김상훈,한영기,최무용 성균관대학교 기초과학연구소 1994 論文集 Vol.45 No.1

CeO_2 single target을 사용하여 on-axis rf magnetron 스퍼터링 방법으로 Si(100) 단결정기판 위에 CeO_2 유전체 박막을 성장시킬 때 기판온도, 산소 부분압력, rf input power, 두께 등의 성장변수들이 박막 성장에 미치는 영향을 조사하여 (ℓ00) 방향 in-situ 성장의 적정조건을 찾는 연구를 하였다. 각기 다른 조건에서 제조된 박막의 X-ray 회절 방법에 의한 구조 분석과 SEM(Scanning Electron Microscopy)에 의한 표면의 미세 구조 분석을 통하여 그 특성을 조사한 결과 기판 온도, 산소 부분압력, rf input power 세기, 박막의 두께가 박막 성장에 결정적인 영향을 미치는 중요 성장 변수임을 확인하였다. CeO_2 박막은 target과 기판사이 거리 50㎜, 총압력 30mTorr일 때 기판 온도 800℃, 산소 부분압력 3 mTon, power 90 W(이때 성장속도 0.83Å/s), 성장시간 2시간(이때 두께 500Å)일 때(ℓ00) 방향으로 잘 성장되는 것을 발견하였다. We have studied systematically the optimum condition for in-situ perparation of CeO_2 thin film on Si(100 substrate by single-target rf-magnetron sputtering method. We examined effects of the substrate temperature, oxygen partial pressure, rf input power, and thickness by studying X-ray diffraction patterns and photographs of scanning electron microscopy of the grown films. We found that all of these parameters influence decisively on the struture of the grown films. We also found that the CeO_2 thin film grows well at∼800℃ of the substrate temperature, 3 mTorr of the oxygen partial pressure, 90 W of the rf input power(corresponding to 0.83Å/s of the deposition rate), and 5000 Å of the thickness for the total sputtering gas of 30 mTorr and the sputtering target of 2 inch diameter used.

針葉樹 幼苗의 모잘록병 發生에 미치는 環境要因의 影響

韓茂錫,尹貞求 충북대학교 농업과학기술연구소 1990 農業科學硏究 Vol.8 No.2

The pathogens causing damping-off of coniferous seedlings were isolated from diseased seedlings of the pine, larch and soil of seedlings bed. After isolating and identifying the causal fungi, ecological factors such as temperature affecting mycelial growth, pathogenicity and conidia germination were investigated. In addition, outbreak of damping-off by different growing stages were also investigated. The results obtained were as follows. 1. The causal pathogens identified were Fusarium moniliforme, F. acuminayum, F. graminearum, the unidentified Fusarium spp. and confirmed their pathogenicity on the seedlings of Pinus densiflora and Pinnus thunbergii. 2. Fusarium moniliforme showed the highest frequency among pathogens isolated from diseased seedings, whereas in the soil, F. acuminatum and F. sp. (8706) showed higher frequency than the others. 3. The optimum temperature for mycelial growth the Fusaria was 25℃~30℃, mycelial growth of every species was discontinued at 5℃, the optimum PH for mycelial growth was at 5.5 to 7.5. 4. Optimum temperature for the conidial germination was at 25℃. At 100% of relative humidity the conidial germination was above 94%, but decreasing trend was shown at less than 90%. 5. The percentage of the diseased seedlings in Pinus densiflora and Larx kaempferi by the fertilizer application were not remarkably different, but N fertilizer showed a positive correlation. 6. The outbreak percentage of diseased seedlings on Pinus densiflora and Larix kaempferi was a negative trend according to their age.

표면처리방법에 따른 강화된 치과용 임플란트의 개발 : Ⅰ.전자빔 진공증착법에 의한 치과용 임플란트의 내구성 개선 Ⅰ.Improvement of Endurance for Dental Implants by EB-PVD Coating Method

최한철,고영무 大韓齒科器材學會 2000 대한치과재료학회지 Vol.27 No.3

Ti-6Al-4V alloy has an excellent fatigue strength but it has a low corrosion resistance compared with pure titanium. To develop the alloys for the dental implant with better corrosion resistance, Ti, TiN and Ti/TiN were coated on Ti-6Al-4V alloy by electron-beam physical vapor deposition(EB-PVD) method. Ti-6Al-4V alloys were made under the condition of hydrogen and vacuum arc furnace and were quenched at 1,000℃ under high purity dried Ar gas atmosphere and were hold at 500℃ for 2hrs to achieve the fatigue strength(1140㎫) of alloys. Corrosion tests of three coated alloys were used to investigate the electrochemical corrosion behavior in 0.9% NaCl solution. The corrosion potential(+200㎷) of Ti-6Al-4V alloys coated with Ti/TiN is higher and lower active and passive current densities than that of alloys coated with Ti(-300㎷), TiN(-100㎷) and uncoated ones(-400㎷). Also uncoated alloys showed the decreasing of the pitting and repassivation potential in comparison with Ti, TiN and Ti/TiN coated alloys. The amount of Ti released was decreased in the order of Ti/TiN, TiN and Ti coated alloys. We conclude that coating Ti/TiN on Ti-6Al-4V is the most effective to improve of corrosion resistance of Ti-6Al-4V alloys with lower corrosion resistance to some extent by using Ti/TiN multilayer EB-PVD coating method.

전자빔 진공증착을 이용한 치과용 임플란트재의 표면 전처리법에 따른 HA 코딩효과

고영무,최한철,최낙찬 大韓齒科器材學會 2002 대한치과재료학회지 Vol.29 No.4

The dental implant materials require good mechanical properties, such as fatigue strength, combined with a high resistance to corrosion. For increasing fatigue resistance and delaying onset of stress corrosion cracking, shot-peening has been used for over 50 years to extend service life of metal components, However, there is no information on the electrochemical behavior of shot-peened and hydroxyapatite(HA) coated Ti-6Al-4V alloys. To increase fatigue strength, good corrosion resistance, and biocompatibility, the electrochemical characteristics of Ti/TiN/HA coated and shot-peened Ti-6Al-4V alloys by EB-PVD have been researched by various electrochemical method in 0.9%NaCl The coated layer and surface showed the formation of dense and uniform surface in the case of TiN/HA and Ti/TiN/HA film coated samples. The hardness of shot-peened Ti-6Al-4V alloys(SPA) increased as SP treatment time increased. Electrochemical measurements showed that, in the case of shot-peened Ti-6Al-4V alloys, the corrosion and pitting potential increased due to the SP induced removal of defects, such as inclusion, scratch, and pore on the surface, whereas passivation and active current density decreased as the SP time increased. For the HA coated samples, pitting and repassivation potential increased in the order of Ti/TiN/Ha > TiN/HA > Ti/HA > HA coated SPA. Results suggest that the best pitting corrosion behavior is shown by Ti/TiN/HA coated SPA with a fatigue strength and biocompatibility.

走破距離를 通한 tennis 競技의 內容 分析 : 國家代表級 男女 選手를 中心으로

趙漢武 仁川敎育大學校 1986 論文集 Vol.20 No.1