고속 마이크로 외팔보 공진시험을 통한 나노스케일 티타늄 박막의 탄성계수 평가

다국어 초록 (Multilingual Abstract)

The Young’s modulus of a nanoscale titanium (Ti) thin-film was evaluated using a high-speed microcantilever resonating at the megahertz frequency in the present study. A 350 nm thick Ti film was deposited on the surface of a silicon microcantilever, and the morphology of the film was analyzed using the atomic force microscopy. The microcantilever was excited to resonate using an ultrasonic pulser that generates tone burst signals and the resonance frequency shift induced by the deposition of Ti was measured using a Michelson interferometer. The Young’s modulus was determined through a modal analysis using the finite element method and the result was validated by the nanoindentation testing, showing good agreement within a relative error of 1.0%. The present study proposes a nanomechanical characterization technique with enhanced accuracy and sensitivity.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. 실험
• 4. 결과 및 토의
• 5. 결론
• References

참고문헌 (Reference)

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