A Study on the Oxidation of Cobalt Film

다국어 초록 (Multilingual Abstract)

The kinetics of the oxidation of Cobalt films have been studied using quartz microbalance from 600℃ to 900℃ under various oxygen pressures.
The oxidations followed the parabolic rate law in all caces and the parabolic rate constant varied apporximately from 1.64×10^-12 to 1.11×10^-11 (g/cm^2)^2 sec^-1
The activation energies calculated from the plots of log K_p vs. 1/T varied between 0.08 eV and 0.3 eV in the above conditions.
The 1/n values obtained from the plots of log K_p vs log Po_2 (or log K_p=1/n log Po_2) are about 1/5 to 1/3.7.
The mechanism for the oxidation of the Cobalt film is discussed in accordance with other mechanisms such as nonstoichiometric mechanism, diffusion mechanism, and conduction mechanism, etc.

목차 (Table of Contents)

• Ⅰ. 緖 論
• Ⅱ. 實 驗
• Ⅲ. 結果 및 考察
• Ⅳ. 結 論
• 參考文獻