It was fabricated the sample of thin film by thermal evaporation method. The P-type was measured by thereto-electric method. For good property of P-type thermoelectric film, it was necessary for two parallel boat and instantaneous volume of current fo...
It was fabricated the sample of thin film by thermal evaporation method. The P-type was measured by thereto-electric method. For good property of P-type thermoelectric film, it was necessary for two parallel boat and instantaneous volume of current for deposition. The composition of deposited films were evaluated by EDAX and measuring the thickness with SEM. The Te-peaks showed good characteristics better than evaporation method by only one boat. So it was found that the P-type films are necessary to Sb2Te3 without Bi and two separate boats. And it was possible to get reproducible data.