마이크로 액추에이터의 실제 거동에 대한 FEA 시뮬레이션

목차 (Table of Contents)

• ABSTRACT
• 1. 서론
• 2. 마이크로 정전 액추에이터
• 3. 시작토오크의 해석적 계산
• 4. FEA 시뮬레이션
• 5. 결론
• 참고문헌

참고문헌 (Reference)

1 Nakajima, "Micromachines as Intelligent Artifacts Proceedings of the 1st International Symposium on Research into Artifacts" 48-51, 1993

2 Gilbert, "Implementation of a MEMCAD System for Electrostatic and Mechanical Analysis of Complex Structures from Mask Descriptions Proceedings of the IEEE Micro Electro Mechanical Systems Workshop" 207-212, 1993

3 Hirano, "Fabrication and Operation of Submicron Gap Comb-Drive Microactuators Journal of Microelectromechanical Systems" 52-59, 1993

4 Lee, "FEA Simulation for Performance Estimation of Micro Actuator Proceedings of the KSPE Conference" 1045-1048, 2002

5 Oh, "Development of Fuzzy Control and Modeling of IPMC Actuator for the Endoscopic Microcapsule Journal of the Korean Society of Precision Engineering" 20 (20): 39-48, 2003

6 Lee, "Automated CAE System for Three-Dimensional Complex Geometry The University of Tokyo" 1995

7 "A Fully Automatic Three-Dimensional Mesh Generator for Complex Geometries International Journal of Numerical Methods in Engineering" 931-952, 1990