Rapid development of micromaching techology has recently attracted considerable attention in the application of microstructure in many ares. In this paper, the principle, the merits and the demerits of methods such as moire, holography and ESPI which ...
Rapid development of micromaching techology has recently attracted considerable attention in the application of microstructure in many ares. In this paper, the principle, the merits and the demerits of methods such as moire, holography and ESPI which apply optics to measure displacement of microstructure are investigated. Through the wide review, we evalute the design criteria for the future application. They should have high sensitivity, possibility of continuous monitoring, 3-dimentional measurement, easy installation, operation and maintenance and cost effectiveness.