Micro scratching test using nanoprobe with multi arrayed tip was carried out in this study. New nanoprobe which was widely used in the measurement of micro structures was developed to apply to cutting tool. Therefore, it can be used in scratching appl...
Micro scratching test using nanoprobe with multi arrayed tip was carried out in this study. New nanoprobe which was widely used in the measurement of micro structures was developed to apply to cutting tool. Therefore, it can be used in scratching applications as well as measuring by changing the tip of probes. When using the probe as cutting tool, the diamond tip of 1×n arrangement was designed to produce multi micro patterns. This process will improve the productivity of manufacturing of micro pattern. In experiments, the angle of a diamond arrangement of tip and pattern intervals were adjusted to find machining characteristics of micro pattern.