진동자를 이용한 하이브리드 극초단 펄스 레이저 초정밀가공시스템 개발 및 Cu-Zn합금 응용 = Development of Vibration Assisted Hybrid Femtosecond Laser Ultra-precision Machining System and Cu-Zn alloy Application

다국어 초록 (Multilingual Abstract)

In this paper, we describe experiment results using a vibration assisted hybrid femtosecond laser (${\lambda}$:795 nm) ultra-precision machining system. The hybrid system we have developed is possible that optical focal point of the femtosecond laser constantly and frequently within the range of PZT(piezoactuator) vibrator working distance. Using the hybrid system, We have experimented on brass and studied about differences of result of hole aspect ratio compare to general experiment setup of femtosecond laser system. Aspect ratio of a micro hole on brass is increased as 54% with 100 Hz vibration frequency and surface roughness of the side wall also improved compare to non-vibration.