3중 접합 공정에 의한 MEMS 공진기의 웨이퍼레벨 진공 패키징 = Wafer-level Vacuum Packaging of a MEMS Resonator using the Three-layer Bonding Technique

다국어 초록 (Multilingual Abstract)

The high vacuum hermetic sealing technique ensures excellent performance of MEMS resonators. For the high vacuum hermetic sealing, the customization of anodic bonding equipment was conducted for the glass/Si/glass triple-stack anodic bonding process. Figure 1 presents the schematic of the MEMS resonator with triple-stack high-vacuum anodic bonding. The anodic bonding process for vacuum sealing was performed with the chamber pressure lower than 5 × 10^-6 mbar, the piston pressure of 5 kN, and the applied voltage was 1 kV. The process temperature during anodic bonding was 400 ℃. To maintain the vacuum condition of the glass cavity, a getter material, such as a titanium thin film, was deposited. The getter materials was active at the 400 ℃ during the anodic bonding process. To read out the electrical signals from the Si resonator, a vertical feed-through was applied by using through glass via (TGV) which is formed by sandblasting technique of cap glass wafer. The aluminum electrodes was conformally deposited on the via-hole structure of cap glass. The TGV process provides reliable electrical interconnection between Si resonator and aluminum electrodes on the cap glass without leakage or electrical disconnection through the TGV. The fabricated MEMS resonator with proposed vacuum packaging using three-layer anodic bonding process has resonance frequency and quality factor of about 16 kHz and more than 40,000, respectively.

참고문헌 (Reference)

1 B. Boxenhorn, "Vibratory micromechanical gyroscope" 1033-1040, 1998

2 T. Fujita, "Two-Dimensional Micromachined Gyroscope" 887-890, 1997

3 M. F. Zaman, "High Performance Matched-Mode Tuning Fork Gyroscope" 66-69, 2006

4 R. Toda, "Electrostatically levitated spherical 3-AXIS accelerometer" 710-713, 2002

5 T. Juneau, "Dualaxis operation of a micromachined rategyroscope" 883-886, 1997

6 S. An, "Dual-axis microgyroscope with closedloop detection" 73 (73): 1-6, 1999

7 M. C. Lee, "A high yield rate MEMS gyroscope with a packaged SiOG process" 15 (15): 2003-2008, 2005

8 K. Kwon, "A bulk-micromachined three-axis accelerometer using silicon direct bonding technology and polysilicon layer" 66 (66): 250-255, 1998

9 P. Monajemi, "A High-Q Low-Voltage HARPSS Tunable Capacitor" 2 : 749-754, 2005

10 M. Lemkin, "A 3-axis force balanced accelerometer using a single proof-mass" 1185-1188, 1997